1/8/2013	8:36:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	8:36:44 AM	Recipe started at 8:36 AM
1/8/2013	8:36:44 AM	Helium valve closed
1/8/2013	8:36:44 AM	H2 valve closed
1/8/2013	8:36:44 AM	BCl3 valve closed
1/8/2013	8:36:44 AM	PH3 valve closed
1/8/2013	8:36:44 AM	SiCl4 pre valve closed
1/8/2013	8:36:44 AM	SiCl4 post valve closed
1/8/2013	8:36:44 AM	Main Vac valve closed
1/8/2013	8:36:44 AM	Bypass valve closed
1/8/2013	8:36:44 AM	Bubbler valve closed
1/8/2013	8:36:44 AM	Helium MFC set to  0.000000
1/8/2013	8:36:44 AM	H2 MFC set to  0.000000
1/8/2013	8:36:44 AM	BCl3 MFC set to  0.000000
1/8/2013	8:36:44 AM	PH3 MFC set to  0.000000
1/8/2013	8:36:44 AM	SiCl4 MFC set to  0.000000
1/8/2013	8:36:44 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	8:36:45 AM	Tube furnace set to 0
1/8/2013	8:36:48 AM	H2 valve closed
1/8/2013	8:36:48 AM	BCl3 valve closed
1/8/2013	8:36:48 AM	PH3 valve closed
1/8/2013	8:36:48 AM	SiCl4 pre valve closed
1/8/2013	8:36:48 AM	SiCl4 post valve closed
1/8/2013	8:36:48 AM	Main Vac valve closed
1/8/2013	8:36:48 AM	Bypass valve closed
1/8/2013	8:36:48 AM	Bubbler valve closed
1/8/2013	8:36:48 AM	Helium valve opened
1/8/2013	8:36:48 AM	Helium MFC set to  500.000000
1/8/2013	8:36:48 AM	H2 MFC set to  0.000000
1/8/2013	8:36:48 AM	BCl3 MFC set to  0.000000
1/8/2013	8:36:48 AM	PH3 MFC set to  0.000000
1/8/2013	8:36:48 AM	SiCl4 MFC set to  0.000000
1/8/2013	8:36:48 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	8:36:48 AM	Tube furnace set to 0
1/8/2013	8:36:57 AM	Helium valve closed
1/8/2013	8:36:57 AM	H2 valve closed
1/8/2013	8:36:57 AM	BCl3 valve closed
1/8/2013	8:36:57 AM	PH3 valve closed
1/8/2013	8:36:57 AM	SiCl4 pre valve closed
1/8/2013	8:36:57 AM	SiCl4 post valve closed
1/8/2013	8:36:57 AM	Main Vac valve closed
1/8/2013	8:36:57 AM	Bypass valve closed
1/8/2013	8:36:57 AM	Bubbler valve closed
1/8/2013	8:36:57 AM	Helium MFC set to  0.000000
1/8/2013	8:36:57 AM	H2 MFC set to  0.000000
1/8/2013	8:36:57 AM	BCl3 MFC set to  0.000000
1/8/2013	8:36:57 AM	PH3 MFC set to  0.000000
1/8/2013	8:36:57 AM	SiCl4 MFC set to  0.000000
1/8/2013	8:36:57 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	8:36:57 AM	Tube furnace set to 0
1/8/2013	8:36:58 AM	Run finished at 8:36 AM
1/8/2013	8:36:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	9:09:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	9:09:54 AM	Recipe started at 9:09 AM
1/8/2013	9:09:54 AM	Helium valve closed
1/8/2013	9:09:54 AM	H2 valve closed
1/8/2013	9:09:54 AM	BCl3 valve closed
1/8/2013	9:09:54 AM	PH3 valve closed
1/8/2013	9:09:54 AM	SiCl4 pre valve closed
1/8/2013	9:09:54 AM	SiCl4 post valve closed
1/8/2013	9:09:54 AM	Main Vac valve closed
1/8/2013	9:09:54 AM	Bypass valve closed
1/8/2013	9:09:54 AM	Bubbler valve closed
1/8/2013	9:09:54 AM	Helium MFC set to  0.000000
1/8/2013	9:09:54 AM	H2 MFC set to  0.000000
1/8/2013	9:09:54 AM	BCl3 MFC set to  0.000000
1/8/2013	9:09:54 AM	PH3 MFC set to  0.000000
1/8/2013	9:09:54 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:09:54 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:09:55 AM	Tube furnace set to 0
1/8/2013	9:09:58 AM	H2 valve closed
1/8/2013	9:09:58 AM	BCl3 valve closed
1/8/2013	9:09:58 AM	PH3 valve closed
1/8/2013	9:09:58 AM	SiCl4 pre valve closed
1/8/2013	9:09:58 AM	SiCl4 post valve closed
1/8/2013	9:09:58 AM	Main Vac valve closed
1/8/2013	9:09:58 AM	Bypass valve closed
1/8/2013	9:09:58 AM	Bubbler valve closed
1/8/2013	9:09:58 AM	Helium valve opened
1/8/2013	9:09:58 AM	Helium MFC set to  500.000000
1/8/2013	9:09:58 AM	H2 MFC set to  0.000000
1/8/2013	9:09:58 AM	BCl3 MFC set to  0.000000
1/8/2013	9:09:58 AM	PH3 MFC set to  0.000000
1/8/2013	9:09:58 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:09:58 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:09:58 AM	Tube furnace set to 0
1/8/2013	9:09:58 AM	Helium valve closed
1/8/2013	9:09:58 AM	H2 valve closed
1/8/2013	9:09:58 AM	BCl3 valve closed
1/8/2013	9:09:58 AM	PH3 valve closed
1/8/2013	9:09:58 AM	SiCl4 pre valve closed
1/8/2013	9:09:58 AM	SiCl4 post valve closed
1/8/2013	9:09:58 AM	Main Vac valve closed
1/8/2013	9:09:58 AM	Bypass valve closed
1/8/2013	9:09:58 AM	Bubbler valve closed
1/8/2013	9:09:58 AM	Helium MFC set to  0.000000
1/8/2013	9:09:58 AM	H2 MFC set to  0.000000
1/8/2013	9:09:58 AM	BCl3 MFC set to  0.000000
1/8/2013	9:09:58 AM	PH3 MFC set to  0.000000
1/8/2013	9:09:58 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:09:58 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:09:58 AM	Tube furnace set to 0
1/8/2013	9:09:59 AM	Run finished at 9:09 AM
1/8/2013	9:09:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	9:11:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	9:11:40 AM	Recipe started at 9:11 AM
1/8/2013	9:11:40 AM	Helium valve closed
1/8/2013	9:11:40 AM	H2 valve closed
1/8/2013	9:11:40 AM	BCl3 valve closed
1/8/2013	9:11:40 AM	PH3 valve closed
1/8/2013	9:11:40 AM	SiCl4 pre valve closed
1/8/2013	9:11:40 AM	SiCl4 post valve closed
1/8/2013	9:11:40 AM	Main Vac valve closed
1/8/2013	9:11:40 AM	Bubbler valve closed
1/8/2013	9:11:40 AM	Bypass valve opened
1/8/2013	9:11:40 AM	Helium MFC set to  0.000000
1/8/2013	9:11:40 AM	H2 MFC set to  0.000000
1/8/2013	9:11:40 AM	BCl3 MFC set to  0.000000
1/8/2013	9:11:40 AM	PH3 MFC set to  0.000000
1/8/2013	9:11:40 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:11:40 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:11:40 AM	Tube furnace set to 0
1/8/2013	9:15:45 AM	Run aborted at 9:15 AM
1/8/2013	9:15:45 AM	Helium valve closed
1/8/2013	9:15:45 AM	H2 valve closed
1/8/2013	9:15:45 AM	BCl3 valve closed
1/8/2013	9:15:45 AM	PH3 valve closed
1/8/2013	9:15:45 AM	SiCl4 pre valve closed
1/8/2013	9:15:45 AM	SiCl4 post valve closed
1/8/2013	9:15:45 AM	Bypass valve closed
1/8/2013	9:15:45 AM	Main Vac valve closed
1/8/2013	9:15:45 AM	Bubbler valve closed
1/8/2013	9:15:45 AM	Helium MFC set to  0.000000
1/8/2013	9:15:45 AM	H2 MFC set to  0.000000
1/8/2013	9:15:45 AM	BCl3 MFC set to  0.000000
1/8/2013	9:15:45 AM	PH3 MFC set to  0.000000
1/8/2013	9:15:45 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:15:45 AM	Tube furnace set to 0
1/8/2013	9:15:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	9:15:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	9:15:48 AM	Recipe started at 9:15 AM
1/8/2013	9:15:48 AM	Helium valve closed
1/8/2013	9:15:48 AM	H2 valve closed
1/8/2013	9:15:48 AM	BCl3 valve closed
1/8/2013	9:15:48 AM	PH3 valve closed
1/8/2013	9:15:48 AM	SiCl4 pre valve closed
1/8/2013	9:15:48 AM	SiCl4 post valve closed
1/8/2013	9:15:48 AM	Main Vac valve closed
1/8/2013	9:15:48 AM	Bypass valve closed
1/8/2013	9:15:48 AM	Bubbler valve closed
1/8/2013	9:15:48 AM	Helium MFC set to  0.000000
1/8/2013	9:15:48 AM	H2 MFC set to  0.000000
1/8/2013	9:15:48 AM	BCl3 MFC set to  0.000000
1/8/2013	9:15:48 AM	PH3 MFC set to  0.000000
1/8/2013	9:15:48 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:15:48 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:15:48 AM	Tube furnace set to 0
1/8/2013	9:15:51 AM	H2 valve closed
1/8/2013	9:15:51 AM	BCl3 valve closed
1/8/2013	9:15:51 AM	PH3 valve closed
1/8/2013	9:15:51 AM	SiCl4 pre valve closed
1/8/2013	9:15:51 AM	SiCl4 post valve closed
1/8/2013	9:15:51 AM	Main Vac valve closed
1/8/2013	9:15:51 AM	Bypass valve closed
1/8/2013	9:15:51 AM	Bubbler valve closed
1/8/2013	9:15:51 AM	Helium valve opened
1/8/2013	9:15:51 AM	Helium MFC set to  500.000000
1/8/2013	9:15:51 AM	H2 MFC set to  0.000000
1/8/2013	9:15:51 AM	BCl3 MFC set to  0.000000
1/8/2013	9:15:51 AM	PH3 MFC set to  0.000000
1/8/2013	9:15:51 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:15:51 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:15:51 AM	Tube furnace set to 0
1/8/2013	9:15:51 AM	Helium valve closed
1/8/2013	9:15:51 AM	H2 valve closed
1/8/2013	9:15:51 AM	BCl3 valve closed
1/8/2013	9:15:51 AM	PH3 valve closed
1/8/2013	9:15:51 AM	SiCl4 pre valve closed
1/8/2013	9:15:51 AM	SiCl4 post valve closed
1/8/2013	9:15:51 AM	Main Vac valve closed
1/8/2013	9:15:51 AM	Bypass valve closed
1/8/2013	9:15:51 AM	Bubbler valve closed
1/8/2013	9:15:51 AM	Helium MFC set to  0.000000
1/8/2013	9:15:51 AM	H2 MFC set to  0.000000
1/8/2013	9:15:51 AM	BCl3 MFC set to  0.000000
1/8/2013	9:15:51 AM	PH3 MFC set to  0.000000
1/8/2013	9:15:51 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:15:51 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:15:52 AM	Tube furnace set to 0
1/8/2013	9:15:53 AM	Run finished at 9:15 AM
1/8/2013	9:15:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	9:16:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	9:16:46 AM	Recipe started at 9:16 AM
1/8/2013	9:16:46 AM	Helium valve closed
1/8/2013	9:16:46 AM	H2 valve closed
1/8/2013	9:16:46 AM	BCl3 valve closed
1/8/2013	9:16:46 AM	PH3 valve closed
1/8/2013	9:16:46 AM	SiCl4 pre valve closed
1/8/2013	9:16:46 AM	SiCl4 post valve closed
1/8/2013	9:16:46 AM	Main Vac valve closed
1/8/2013	9:16:46 AM	Bubbler valve closed
1/8/2013	9:16:46 AM	Bypass valve opened
1/8/2013	9:16:46 AM	Helium MFC set to  0.000000
1/8/2013	9:16:46 AM	H2 MFC set to  0.000000
1/8/2013	9:16:46 AM	BCl3 MFC set to  0.000000
1/8/2013	9:16:46 AM	PH3 MFC set to  0.000000
1/8/2013	9:16:46 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:16:46 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:16:46 AM	Tube furnace set to 0
1/8/2013	9:18:17 AM	Run aborted at 9:18 AM
1/8/2013	9:18:17 AM	Helium valve closed
1/8/2013	9:18:17 AM	H2 valve closed
1/8/2013	9:18:17 AM	BCl3 valve closed
1/8/2013	9:18:17 AM	PH3 valve closed
1/8/2013	9:18:17 AM	SiCl4 pre valve closed
1/8/2013	9:18:17 AM	SiCl4 post valve closed
1/8/2013	9:18:17 AM	Bypass valve closed
1/8/2013	9:18:17 AM	Main Vac valve closed
1/8/2013	9:18:17 AM	Bubbler valve closed
1/8/2013	9:18:17 AM	Helium MFC set to  0.000000
1/8/2013	9:18:17 AM	H2 MFC set to  0.000000
1/8/2013	9:18:17 AM	BCl3 MFC set to  0.000000
1/8/2013	9:18:17 AM	PH3 MFC set to  0.000000
1/8/2013	9:18:17 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:18:17 AM	Tube furnace set to 0
1/8/2013	9:18:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	9:18:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	9:18:21 AM	Recipe started at 9:18 AM
1/8/2013	9:18:21 AM	Helium valve closed
1/8/2013	9:18:21 AM	H2 valve closed
1/8/2013	9:18:21 AM	BCl3 valve closed
1/8/2013	9:18:21 AM	PH3 valve closed
1/8/2013	9:18:21 AM	SiCl4 pre valve closed
1/8/2013	9:18:21 AM	SiCl4 post valve closed
1/8/2013	9:18:21 AM	Main Vac valve closed
1/8/2013	9:18:21 AM	Bypass valve closed
1/8/2013	9:18:21 AM	Bubbler valve closed
1/8/2013	9:18:21 AM	Helium MFC set to  0.000000
1/8/2013	9:18:21 AM	H2 MFC set to  0.000000
1/8/2013	9:18:21 AM	BCl3 MFC set to  0.000000
1/8/2013	9:18:21 AM	PH3 MFC set to  0.000000
1/8/2013	9:18:21 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:18:21 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:18:21 AM	Tube furnace set to 0
1/8/2013	9:18:24 AM	H2 valve closed
1/8/2013	9:18:24 AM	BCl3 valve closed
1/8/2013	9:18:24 AM	PH3 valve closed
1/8/2013	9:18:24 AM	SiCl4 pre valve closed
1/8/2013	9:18:24 AM	SiCl4 post valve closed
1/8/2013	9:18:24 AM	Main Vac valve closed
1/8/2013	9:18:24 AM	Bypass valve closed
1/8/2013	9:18:24 AM	Bubbler valve closed
1/8/2013	9:18:24 AM	Helium valve opened
1/8/2013	9:18:24 AM	Helium MFC set to  500.000000
1/8/2013	9:18:24 AM	H2 MFC set to  0.000000
1/8/2013	9:18:24 AM	BCl3 MFC set to  0.000000
1/8/2013	9:18:24 AM	PH3 MFC set to  0.000000
1/8/2013	9:18:24 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:18:24 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:18:24 AM	Tube furnace set to 0
1/8/2013	9:18:43 AM	Helium valve closed
1/8/2013	9:18:43 AM	H2 valve closed
1/8/2013	9:18:43 AM	BCl3 valve closed
1/8/2013	9:18:43 AM	PH3 valve closed
1/8/2013	9:18:43 AM	SiCl4 pre valve closed
1/8/2013	9:18:43 AM	SiCl4 post valve closed
1/8/2013	9:18:43 AM	Main Vac valve closed
1/8/2013	9:18:43 AM	Bypass valve closed
1/8/2013	9:18:43 AM	Bubbler valve closed
1/8/2013	9:18:43 AM	Helium MFC set to  0.000000
1/8/2013	9:18:43 AM	H2 MFC set to  0.000000
1/8/2013	9:18:43 AM	BCl3 MFC set to  0.000000
1/8/2013	9:18:43 AM	PH3 MFC set to  0.000000
1/8/2013	9:18:43 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:18:43 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:18:43 AM	Tube furnace set to 0
1/8/2013	9:18:44 AM	Run finished at 9:18 AM
1/8/2013	9:18:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	9:22:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	9:22:45 AM	Recipe started at 9:22 AM
1/8/2013	9:22:45 AM	Helium valve closed
1/8/2013	9:22:45 AM	H2 valve closed
1/8/2013	9:22:45 AM	BCl3 valve closed
1/8/2013	9:22:45 AM	PH3 valve closed
1/8/2013	9:22:45 AM	SiCl4 pre valve closed
1/8/2013	9:22:45 AM	SiCl4 post valve closed
1/8/2013	9:22:45 AM	Main Vac valve closed
1/8/2013	9:22:45 AM	Bubbler valve closed
1/8/2013	9:22:45 AM	Bypass valve opened
1/8/2013	9:22:45 AM	Helium MFC set to  0.000000
1/8/2013	9:22:45 AM	H2 MFC set to  0.000000
1/8/2013	9:22:45 AM	BCl3 MFC set to  0.000000
1/8/2013	9:22:45 AM	PH3 MFC set to  0.000000
1/8/2013	9:22:45 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:22:45 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:22:45 AM	Tube furnace set to 0
1/8/2013	9:24:16 AM	Helium valve closed
1/8/2013	9:24:16 AM	H2 valve closed
1/8/2013	9:24:16 AM	BCl3 valve closed
1/8/2013	9:24:16 AM	PH3 valve closed
1/8/2013	9:24:16 AM	SiCl4 pre valve closed
1/8/2013	9:24:16 AM	SiCl4 post valve closed
1/8/2013	9:24:16 AM	Main Vac valve closed
1/8/2013	9:24:16 AM	Bubbler valve closed
1/8/2013	9:24:16 AM	Bypass valve opened
1/8/2013	9:24:16 AM	Helium MFC set to  0.000000
1/8/2013	9:24:16 AM	H2 MFC set to  0.000000
1/8/2013	9:24:16 AM	BCl3 MFC set to  0.000000
1/8/2013	9:24:16 AM	PH3 MFC set to  0.000000
1/8/2013	9:24:16 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:24:16 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:24:16 AM	Tube furnace set to 0
1/8/2013	9:25:16 AM	Helium valve closed
1/8/2013	9:25:17 AM	H2 valve closed
1/8/2013	9:25:17 AM	BCl3 valve closed
1/8/2013	9:25:17 AM	PH3 valve closed
1/8/2013	9:25:17 AM	SiCl4 pre valve closed
1/8/2013	9:25:17 AM	SiCl4 post valve closed
1/8/2013	9:25:17 AM	Bypass valve closed
1/8/2013	9:25:17 AM	Bubbler valve closed
1/8/2013	9:25:17 AM	Main Vac valve opened
1/8/2013	9:25:17 AM	Helium MFC set to  0.000000
1/8/2013	9:25:17 AM	H2 MFC set to  0.000000
1/8/2013	9:25:17 AM	BCl3 MFC set to  0.000000
1/8/2013	9:25:17 AM	PH3 MFC set to  0.000000
1/8/2013	9:25:17 AM	SiCl4 MFC set to  0.000000
1/8/2013	9:25:17 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	9:25:17 AM	Tube furnace set to 0
1/8/2013	9:25:18 AM	Run finished at 9:25 AM
1/8/2013	9:25:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	11:13:22 AM	Main Vac valve closed
1/8/2013	11:13:31 AM	Main Vac valve opened
1/8/2013	11:14:18 AM	Main Vac valve closed
1/8/2013	11:14:20 AM	Main Vac valve opened
1/8/2013	11:14:52 AM	Bypass valve opened
1/8/2013	11:14:54 AM	Bypass valve closed
1/8/2013	11:15:13 AM	Tube furnace set to 150
1/8/2013	11:15:32 AM	Helium valve opened
1/8/2013	11:15:34 AM	Helium valve closed
1/8/2013	11:15:36 AM	Helium valve opened
1/8/2013	11:15:38 AM	Helium valve closed
1/8/2013	11:16:02 AM	Helium MFC set to  1.000000
1/8/2013	11:16:10 AM	Helium MFC set to  1.000000
1/8/2013	11:17:12 AM	Helium valve opened
1/8/2013	11:18:03 AM	Helium MFC set to  10.000000
1/8/2013	11:18:27 AM	Helium valve closed
1/8/2013	11:18:56 AM	Program exited cleanly
1/8/2013	11:18:57 AM	Helium valve closed
1/8/2013	11:18:57 AM	H2 valve closed
1/8/2013	11:18:57 AM	BCl3 valve closed
1/8/2013	11:18:57 AM	PH3 valve closed
1/8/2013	11:18:57 AM	SiCl4 pre valve closed
1/8/2013	11:18:58 AM	SiCl4 post valve closed
1/8/2013	11:18:58 AM	Main Vac valve closed
1/8/2013	11:18:58 AM	Bypass valve closed
1/8/2013	11:18:58 AM	Bubbler valve closed
1/8/2013	11:18:58 AM	Helium MFC set to  0.000000
1/8/2013	11:18:58 AM	H2 MFC set to  0.000000
1/8/2013	11:18:58 AM	BCl3 MFC set to  0.000000
1/8/2013	11:18:58 AM	PH3 MFC set to  0.000000
1/8/2013	11:18:58 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:18:58 AM	Bypass solenoid MFC set to  760.000000
1/8/2013	11:18:58 AM	Tube furnace set to 0
1/8/2013	11:19:02 AM	Main Vac valve opened
1/8/2013	11:19:15 AM	Program exited cleanly
1/8/2013	11:19:18 AM	Helium valve closed
1/8/2013	11:19:18 AM	H2 valve closed
1/8/2013	11:19:18 AM	BCl3 valve closed
1/8/2013	11:19:18 AM	PH3 valve closed
1/8/2013	11:19:18 AM	SiCl4 pre valve closed
1/8/2013	11:19:18 AM	SiCl4 post valve closed
1/8/2013	11:19:18 AM	Main Vac valve closed
1/8/2013	11:19:18 AM	Bypass valve closed
1/8/2013	11:19:18 AM	Bubbler valve closed
1/8/2013	11:19:18 AM	Helium MFC set to  0.000000
1/8/2013	11:19:18 AM	H2 MFC set to  0.000000
1/8/2013	11:19:18 AM	BCl3 MFC set to  0.000000
1/8/2013	11:19:18 AM	PH3 MFC set to  0.000000
1/8/2013	11:19:18 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:19:18 AM	Bypass solenoid MFC set to  760.000000
1/8/2013	11:19:18 AM	Tube furnace set to 0
1/8/2013	11:19:20 AM	Main Vac valve opened
1/8/2013	11:22:08 AM	Recipe started at 11:22 AM
1/8/2013	11:22:08 AM	Helium valve closed
1/8/2013	11:22:08 AM	H2 valve closed
1/8/2013	11:22:08 AM	BCl3 valve closed
1/8/2013	11:22:08 AM	PH3 valve closed
1/8/2013	11:22:08 AM	SiCl4 pre valve closed
1/8/2013	11:22:08 AM	SiCl4 post valve closed
1/8/2013	11:22:08 AM	Bypass valve closed
1/8/2013	11:22:08 AM	Bubbler valve closed
1/8/2013	11:22:08 AM	Main Vac valve opened
1/8/2013	11:22:08 AM	Helium MFC set to  0.000000
1/8/2013	11:22:08 AM	H2 MFC set to  0.000000
1/8/2013	11:22:08 AM	BCl3 MFC set to  0.000000
1/8/2013	11:22:08 AM	PH3 MFC set to  0.000000
1/8/2013	11:22:08 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:22:08 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:22:08 AM	Tube furnace set to 0
1/8/2013	11:22:37 AM	Run finished at 11:22 AM
1/8/2013	11:23:03 AM	Recipe started at 11:23 AM
1/8/2013	11:23:03 AM	Helium valve closed
1/8/2013	11:23:03 AM	H2 valve closed
1/8/2013	11:23:03 AM	BCl3 valve closed
1/8/2013	11:23:03 AM	PH3 valve closed
1/8/2013	11:23:03 AM	SiCl4 pre valve closed
1/8/2013	11:23:03 AM	SiCl4 post valve closed
1/8/2013	11:23:03 AM	Bypass valve closed
1/8/2013	11:23:03 AM	Bubbler valve closed
1/8/2013	11:23:03 AM	Main Vac valve opened
1/8/2013	11:23:03 AM	Helium MFC set to  0.000000
1/8/2013	11:23:03 AM	H2 MFC set to  0.000000
1/8/2013	11:23:03 AM	BCl3 MFC set to  0.000000
1/8/2013	11:23:03 AM	PH3 MFC set to  0.000000
1/8/2013	11:23:03 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:23:03 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:23:03 AM	Tube furnace set to 0
1/8/2013	11:23:06 AM	Run finished at 11:23 AM
1/8/2013	11:23:09 AM	Recipe started at 11:23 AM
1/8/2013	11:23:09 AM	Helium valve closed
1/8/2013	11:23:09 AM	H2 valve closed
1/8/2013	11:23:09 AM	BCl3 valve closed
1/8/2013	11:23:09 AM	PH3 valve closed
1/8/2013	11:23:09 AM	SiCl4 pre valve closed
1/8/2013	11:23:09 AM	SiCl4 post valve closed
1/8/2013	11:23:09 AM	Bypass valve closed
1/8/2013	11:23:09 AM	Bubbler valve closed
1/8/2013	11:23:09 AM	Main Vac valve opened
1/8/2013	11:23:09 AM	Helium MFC set to  0.000000
1/8/2013	11:23:09 AM	H2 MFC set to  0.000000
1/8/2013	11:23:09 AM	BCl3 MFC set to  0.000000
1/8/2013	11:23:09 AM	PH3 MFC set to  0.000000
1/8/2013	11:23:09 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:23:09 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:23:09 AM	Tube furnace set to 0
1/8/2013	11:23:39 AM	Run finished at 11:23 AM
1/8/2013	11:24:47 AM	Program exited cleanly
1/8/2013	11:24:49 AM	Helium valve closed
1/8/2013	11:24:49 AM	H2 valve closed
1/8/2013	11:24:49 AM	BCl3 valve closed
1/8/2013	11:24:49 AM	PH3 valve closed
1/8/2013	11:24:49 AM	SiCl4 pre valve closed
1/8/2013	11:24:49 AM	SiCl4 post valve closed
1/8/2013	11:24:49 AM	Main Vac valve closed
1/8/2013	11:24:49 AM	Bypass valve closed
1/8/2013	11:24:49 AM	Bubbler valve closed
1/8/2013	11:24:49 AM	Helium MFC set to  0.000000
1/8/2013	11:24:49 AM	H2 MFC set to  0.000000
1/8/2013	11:24:50 AM	BCl3 MFC set to  0.000000
1/8/2013	11:24:50 AM	PH3 MFC set to  0.000000
1/8/2013	11:24:50 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:24:50 AM	Bypass solenoid MFC set to  760.000000
1/8/2013	11:24:50 AM	Tube furnace set to 0
1/8/2013	11:24:51 AM	Main Vac valve opened
1/8/2013	11:24:58 AM	Recipe started at 11:24 AM
1/8/2013	11:24:58 AM	Helium valve closed
1/8/2013	11:24:58 AM	H2 valve closed
1/8/2013	11:24:58 AM	BCl3 valve closed
1/8/2013	11:24:58 AM	PH3 valve closed
1/8/2013	11:24:58 AM	SiCl4 pre valve closed
1/8/2013	11:24:58 AM	SiCl4 post valve closed
1/8/2013	11:24:58 AM	Bypass valve closed
1/8/2013	11:24:58 AM	Bubbler valve closed
1/8/2013	11:24:58 AM	Main Vac valve opened
1/8/2013	11:24:58 AM	Helium MFC set to  0.000000
1/8/2013	11:24:58 AM	H2 MFC set to  0.000000
1/8/2013	11:24:58 AM	BCl3 MFC set to  0.000000
1/8/2013	11:24:58 AM	PH3 MFC set to  0.000000
1/8/2013	11:24:58 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:24:58 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:24:59 AM	Tube furnace set to 0
1/8/2013	11:24:59 AM	Run finished at 11:24 AM
1/8/2013	11:25:06 AM	Recipe started at 11:25 AM
1/8/2013	11:25:06 AM	Helium valve closed
1/8/2013	11:25:06 AM	H2 valve closed
1/8/2013	11:25:06 AM	BCl3 valve closed
1/8/2013	11:25:06 AM	PH3 valve closed
1/8/2013	11:25:06 AM	SiCl4 pre valve closed
1/8/2013	11:25:06 AM	SiCl4 post valve closed
1/8/2013	11:25:06 AM	Bypass valve closed
1/8/2013	11:25:06 AM	Bubbler valve closed
1/8/2013	11:25:06 AM	Main Vac valve opened
1/8/2013	11:25:06 AM	Helium MFC set to  0.000000
1/8/2013	11:25:06 AM	H2 MFC set to  0.000000
1/8/2013	11:25:06 AM	BCl3 MFC set to  0.000000
1/8/2013	11:25:06 AM	PH3 MFC set to  0.000000
1/8/2013	11:25:06 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:25:06 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:25:06 AM	Tube furnace set to 0
1/8/2013	11:26:06 AM	Run finished at 11:26 AM
1/8/2013	11:29:46 AM	Recipe started at 11:29 AM
1/8/2013	11:29:46 AM	Helium valve closed
1/8/2013	11:29:46 AM	H2 valve closed
1/8/2013	11:29:46 AM	BCl3 valve closed
1/8/2013	11:29:46 AM	PH3 valve closed
1/8/2013	11:29:46 AM	SiCl4 pre valve closed
1/8/2013	11:29:46 AM	SiCl4 post valve closed
1/8/2013	11:29:46 AM	Bypass valve closed
1/8/2013	11:29:46 AM	Bubbler valve closed
1/8/2013	11:29:46 AM	Main Vac valve opened
1/8/2013	11:29:46 AM	Helium MFC set to  0.000000
1/8/2013	11:29:46 AM	H2 MFC set to  0.000000
1/8/2013	11:29:46 AM	BCl3 MFC set to  0.000000
1/8/2013	11:29:46 AM	PH3 MFC set to  0.000000
1/8/2013	11:29:46 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:29:46 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:29:46 AM	Tube furnace set to 150
1/8/2013	11:30:10 AM	Run aborted at 11:30 AM
1/8/2013	11:30:10 AM	Helium valve closed
1/8/2013	11:30:10 AM	H2 valve closed
1/8/2013	11:30:10 AM	BCl3 valve closed
1/8/2013	11:30:10 AM	PH3 valve closed
1/8/2013	11:30:10 AM	SiCl4 pre valve closed
1/8/2013	11:30:10 AM	SiCl4 post valve closed
1/8/2013	11:30:10 AM	Bypass valve closed
1/8/2013	11:30:10 AM	Main Vac valve closed
1/8/2013	11:30:10 AM	Bubbler valve closed
1/8/2013	11:30:10 AM	Helium MFC set to  0.000000
1/8/2013	11:30:10 AM	H2 MFC set to  0.000000
1/8/2013	11:30:10 AM	BCl3 MFC set to  0.000000
1/8/2013	11:30:10 AM	PH3 MFC set to  0.000000
1/8/2013	11:30:10 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:30:10 AM	Tube furnace set to 0
1/8/2013	11:30:13 AM	Main Vac valve opened
1/8/2013	11:41:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	11:41:11 AM	Recipe started at 11:41 AM
1/8/2013	11:41:11 AM	Helium valve closed
1/8/2013	11:41:11 AM	H2 valve closed
1/8/2013	11:41:11 AM	BCl3 valve closed
1/8/2013	11:41:11 AM	PH3 valve closed
1/8/2013	11:41:11 AM	SiCl4 pre valve closed
1/8/2013	11:41:11 AM	SiCl4 post valve closed
1/8/2013	11:41:11 AM	Main Vac valve closed
1/8/2013	11:41:11 AM	Bypass valve closed
1/8/2013	11:41:11 AM	Bubbler valve closed
1/8/2013	11:41:11 AM	Helium MFC set to  0.000000
1/8/2013	11:41:11 AM	H2 MFC set to  0.000000
1/8/2013	11:41:11 AM	BCl3 MFC set to  0.000000
1/8/2013	11:41:11 AM	PH3 MFC set to  0.000000
1/8/2013	11:41:12 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:41:12 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:41:12 AM	Tube furnace set to 0
1/8/2013	11:41:15 AM	H2 valve closed
1/8/2013	11:41:15 AM	BCl3 valve closed
1/8/2013	11:41:15 AM	PH3 valve closed
1/8/2013	11:41:15 AM	SiCl4 pre valve closed
1/8/2013	11:41:15 AM	SiCl4 post valve closed
1/8/2013	11:41:15 AM	Main Vac valve closed
1/8/2013	11:41:15 AM	Bypass valve closed
1/8/2013	11:41:15 AM	Bubbler valve closed
1/8/2013	11:41:15 AM	Helium valve opened
1/8/2013	11:41:15 AM	Helium MFC set to  500.000000
1/8/2013	11:41:15 AM	H2 MFC set to  0.000000
1/8/2013	11:41:15 AM	BCl3 MFC set to  0.000000
1/8/2013	11:41:15 AM	PH3 MFC set to  0.000000
1/8/2013	11:41:15 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:41:15 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:41:15 AM	Tube furnace set to 0
1/8/2013	11:42:26 AM	Helium valve closed
1/8/2013	11:42:26 AM	H2 valve closed
1/8/2013	11:42:26 AM	BCl3 valve closed
1/8/2013	11:42:26 AM	PH3 valve closed
1/8/2013	11:42:26 AM	SiCl4 pre valve closed
1/8/2013	11:42:26 AM	SiCl4 post valve closed
1/8/2013	11:42:26 AM	Main Vac valve closed
1/8/2013	11:42:26 AM	Bypass valve closed
1/8/2013	11:42:26 AM	Bubbler valve closed
1/8/2013	11:42:26 AM	Helium MFC set to  0.000000
1/8/2013	11:42:26 AM	H2 MFC set to  0.000000
1/8/2013	11:42:26 AM	BCl3 MFC set to  0.000000
1/8/2013	11:42:26 AM	PH3 MFC set to  0.000000
1/8/2013	11:42:26 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:42:26 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:42:26 AM	Tube furnace set to 0
1/8/2013	11:42:27 AM	Run finished at 11:42 AM
1/8/2013	11:42:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	11:58:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	11:58:08 AM	Recipe started at 11:58 AM
1/8/2013	11:58:08 AM	Helium valve closed
1/8/2013	11:58:08 AM	H2 valve closed
1/8/2013	11:58:08 AM	BCl3 valve closed
1/8/2013	11:58:08 AM	PH3 valve closed
1/8/2013	11:58:08 AM	SiCl4 pre valve closed
1/8/2013	11:58:08 AM	SiCl4 post valve closed
1/8/2013	11:58:08 AM	Main Vac valve closed
1/8/2013	11:58:08 AM	Bubbler valve closed
1/8/2013	11:58:08 AM	Bypass valve opened
1/8/2013	11:58:08 AM	Helium MFC set to  0.000000
1/8/2013	11:58:08 AM	H2 MFC set to  0.000000
1/8/2013	11:58:08 AM	BCl3 MFC set to  0.000000
1/8/2013	11:58:08 AM	PH3 MFC set to  0.000000
1/8/2013	11:58:08 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:58:08 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:58:08 AM	Tube furnace set to 0
1/8/2013	11:59:26 AM	Helium valve closed
1/8/2013	11:59:26 AM	H2 valve closed
1/8/2013	11:59:26 AM	BCl3 valve closed
1/8/2013	11:59:26 AM	PH3 valve closed
1/8/2013	11:59:26 AM	SiCl4 pre valve closed
1/8/2013	11:59:26 AM	SiCl4 post valve closed
1/8/2013	11:59:26 AM	Main Vac valve closed
1/8/2013	11:59:26 AM	Bubbler valve closed
1/8/2013	11:59:26 AM	Bypass valve opened
1/8/2013	11:59:26 AM	Helium MFC set to  0.000000
1/8/2013	11:59:26 AM	H2 MFC set to  0.000000
1/8/2013	11:59:26 AM	BCl3 MFC set to  0.000000
1/8/2013	11:59:26 AM	PH3 MFC set to  0.000000
1/8/2013	11:59:26 AM	SiCl4 MFC set to  0.000000
1/8/2013	11:59:26 AM	Bypass solenoid MFC set to  0.000000
1/8/2013	11:59:26 AM	Tube furnace set to 0
1/8/2013	12:00:26 PM	Helium valve closed
1/8/2013	12:00:26 PM	H2 valve closed
1/8/2013	12:00:26 PM	BCl3 valve closed
1/8/2013	12:00:26 PM	PH3 valve closed
1/8/2013	12:00:26 PM	SiCl4 pre valve closed
1/8/2013	12:00:26 PM	SiCl4 post valve closed
1/8/2013	12:00:26 PM	Bypass valve closed
1/8/2013	12:00:26 PM	Bubbler valve closed
1/8/2013	12:00:26 PM	Main Vac valve opened
1/8/2013	12:00:26 PM	Helium MFC set to  0.000000
1/8/2013	12:00:26 PM	H2 MFC set to  0.000000
1/8/2013	12:00:26 PM	BCl3 MFC set to  0.000000
1/8/2013	12:00:26 PM	PH3 MFC set to  0.000000
1/8/2013	12:00:26 PM	SiCl4 MFC set to  0.000000
1/8/2013	12:00:26 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	12:00:26 PM	Tube furnace set to 0
1/8/2013	12:00:27 PM	Run finished at 12:00 PM
1/8/2013	12:00:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	12:01:23 PM	Tube furnace set to 150
1/8/2013	12:02:03 PM	Main Vac valve closed
1/8/2013	12:02:15 PM	Main Vac valve opened
1/8/2013	12:52:27 PM	Main Vac valve closed
1/8/2013	12:52:42 PM	Main Vac valve opened
1/8/2013	1:07:08 PM	Recipe started at 1:07 PM
1/8/2013	1:07:08 PM	Helium valve closed
1/8/2013	1:07:08 PM	H2 valve closed
1/8/2013	1:07:08 PM	BCl3 valve closed
1/8/2013	1:07:08 PM	PH3 valve closed
1/8/2013	1:07:08 PM	SiCl4 pre valve closed
1/8/2013	1:07:08 PM	SiCl4 post valve closed
1/8/2013	1:07:08 PM	Bypass valve closed
1/8/2013	1:07:08 PM	Bubbler valve closed
1/8/2013	1:07:08 PM	Main Vac valve opened
1/8/2013	1:07:08 PM	Helium MFC set to  0.000000
1/8/2013	1:07:08 PM	H2 MFC set to  0.000000
1/8/2013	1:07:08 PM	BCl3 MFC set to  0.000000
1/8/2013	1:07:08 PM	PH3 MFC set to  0.000000
1/8/2013	1:07:08 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:07:08 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:07:08 PM	Tube furnace set to 150
1/8/2013	1:07:38 PM	H2 valve closed
1/8/2013	1:07:38 PM	BCl3 valve closed
1/8/2013	1:07:38 PM	PH3 valve closed
1/8/2013	1:07:38 PM	SiCl4 pre valve closed
1/8/2013	1:07:38 PM	SiCl4 post valve closed
1/8/2013	1:07:38 PM	Bypass valve closed
1/8/2013	1:07:38 PM	Bubbler valve closed
1/8/2013	1:07:38 PM	Helium valve opened
1/8/2013	1:07:38 PM	Main Vac valve opened
1/8/2013	1:07:38 PM	Helium MFC set to  20.000000
1/8/2013	1:07:38 PM	H2 MFC set to  0.000000
1/8/2013	1:07:38 PM	BCl3 MFC set to  0.000000
1/8/2013	1:07:38 PM	PH3 MFC set to  0.000000
1/8/2013	1:07:38 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:07:38 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:07:39 PM	Tube furnace set to 150
1/8/2013	1:08:09 PM	Helium valve closed
1/8/2013	1:08:09 PM	H2 valve closed
1/8/2013	1:08:09 PM	BCl3 valve closed
1/8/2013	1:08:09 PM	PH3 valve closed
1/8/2013	1:08:09 PM	SiCl4 pre valve closed
1/8/2013	1:08:09 PM	SiCl4 post valve closed
1/8/2013	1:08:09 PM	Bypass valve closed
1/8/2013	1:08:09 PM	Bubbler valve closed
1/8/2013	1:08:09 PM	Main Vac valve opened
1/8/2013	1:08:09 PM	Helium MFC set to  0.000000
1/8/2013	1:08:09 PM	H2 MFC set to  0.000000
1/8/2013	1:08:09 PM	BCl3 MFC set to  0.000000
1/8/2013	1:08:09 PM	PH3 MFC set to  0.000000
1/8/2013	1:08:09 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:08:09 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:08:09 PM	Tube furnace set to 150
1/8/2013	1:08:39 PM	H2 valve closed
1/8/2013	1:08:39 PM	BCl3 valve closed
1/8/2013	1:08:39 PM	PH3 valve closed
1/8/2013	1:08:39 PM	SiCl4 pre valve closed
1/8/2013	1:08:39 PM	SiCl4 post valve closed
1/8/2013	1:08:39 PM	Bypass valve closed
1/8/2013	1:08:39 PM	Bubbler valve closed
1/8/2013	1:08:39 PM	Helium valve opened
1/8/2013	1:08:39 PM	Main Vac valve opened
1/8/2013	1:08:39 PM	Helium MFC set to  20.000000
1/8/2013	1:08:39 PM	H2 MFC set to  0.000000
1/8/2013	1:08:39 PM	BCl3 MFC set to  0.000000
1/8/2013	1:08:39 PM	PH3 MFC set to  0.000000
1/8/2013	1:08:39 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:08:39 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:08:39 PM	Tube furnace set to 150
1/8/2013	1:09:09 PM	Helium valve closed
1/8/2013	1:09:09 PM	H2 valve closed
1/8/2013	1:09:09 PM	BCl3 valve closed
1/8/2013	1:09:09 PM	PH3 valve closed
1/8/2013	1:09:09 PM	SiCl4 pre valve closed
1/8/2013	1:09:09 PM	SiCl4 post valve closed
1/8/2013	1:09:09 PM	Bypass valve closed
1/8/2013	1:09:09 PM	Bubbler valve closed
1/8/2013	1:09:09 PM	Main Vac valve opened
1/8/2013	1:09:09 PM	Helium MFC set to  0.000000
1/8/2013	1:09:09 PM	H2 MFC set to  0.000000
1/8/2013	1:09:09 PM	BCl3 MFC set to  0.000000
1/8/2013	1:09:09 PM	PH3 MFC set to  0.000000
1/8/2013	1:09:09 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:09:09 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:09:09 PM	Tube furnace set to 150
1/8/2013	1:09:39 PM	H2 valve closed
1/8/2013	1:09:39 PM	BCl3 valve closed
1/8/2013	1:09:39 PM	PH3 valve closed
1/8/2013	1:09:39 PM	SiCl4 pre valve closed
1/8/2013	1:09:39 PM	SiCl4 post valve closed
1/8/2013	1:09:39 PM	Bypass valve closed
1/8/2013	1:09:39 PM	Bubbler valve closed
1/8/2013	1:09:39 PM	Helium valve opened
1/8/2013	1:09:39 PM	Main Vac valve opened
1/8/2013	1:09:39 PM	Helium MFC set to  20.000000
1/8/2013	1:09:39 PM	H2 MFC set to  0.000000
1/8/2013	1:09:39 PM	BCl3 MFC set to  0.000000
1/8/2013	1:09:39 PM	PH3 MFC set to  0.000000
1/8/2013	1:09:39 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:09:39 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:09:40 PM	Tube furnace set to 150
1/8/2013	1:10:10 PM	Helium valve closed
1/8/2013	1:10:10 PM	H2 valve closed
1/8/2013	1:10:10 PM	BCl3 valve closed
1/8/2013	1:10:10 PM	PH3 valve closed
1/8/2013	1:10:10 PM	SiCl4 pre valve closed
1/8/2013	1:10:10 PM	SiCl4 post valve closed
1/8/2013	1:10:10 PM	Bypass valve closed
1/8/2013	1:10:10 PM	Bubbler valve closed
1/8/2013	1:10:10 PM	Main Vac valve opened
1/8/2013	1:10:10 PM	Helium MFC set to  0.000000
1/8/2013	1:10:10 PM	H2 MFC set to  0.000000
1/8/2013	1:10:10 PM	BCl3 MFC set to  0.000000
1/8/2013	1:10:10 PM	PH3 MFC set to  0.000000
1/8/2013	1:10:10 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:10:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:10:10 PM	Tube furnace set to 150
1/8/2013	1:10:40 PM	H2 valve closed
1/8/2013	1:10:40 PM	BCl3 valve closed
1/8/2013	1:10:40 PM	PH3 valve closed
1/8/2013	1:10:40 PM	SiCl4 pre valve closed
1/8/2013	1:10:40 PM	SiCl4 post valve closed
1/8/2013	1:10:40 PM	Bypass valve closed
1/8/2013	1:10:40 PM	Bubbler valve closed
1/8/2013	1:10:40 PM	Helium valve opened
1/8/2013	1:10:40 PM	Main Vac valve opened
1/8/2013	1:10:40 PM	Helium MFC set to  20.000000
1/8/2013	1:10:40 PM	H2 MFC set to  0.000000
1/8/2013	1:10:40 PM	BCl3 MFC set to  0.000000
1/8/2013	1:10:40 PM	PH3 MFC set to  0.000000
1/8/2013	1:10:40 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:10:40 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:10:40 PM	Tube furnace set to 150
1/8/2013	1:11:10 PM	Helium valve closed
1/8/2013	1:11:10 PM	H2 valve closed
1/8/2013	1:11:10 PM	BCl3 valve closed
1/8/2013	1:11:10 PM	PH3 valve closed
1/8/2013	1:11:10 PM	SiCl4 pre valve closed
1/8/2013	1:11:10 PM	SiCl4 post valve closed
1/8/2013	1:11:10 PM	Bypass valve closed
1/8/2013	1:11:10 PM	Bubbler valve closed
1/8/2013	1:11:10 PM	Main Vac valve opened
1/8/2013	1:11:10 PM	Helium MFC set to  0.000000
1/8/2013	1:11:10 PM	H2 MFC set to  0.000000
1/8/2013	1:11:10 PM	BCl3 MFC set to  0.000000
1/8/2013	1:11:10 PM	PH3 MFC set to  0.000000
1/8/2013	1:11:10 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:11:10 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:11:10 PM	Tube furnace set to 150
1/8/2013	1:11:40 PM	H2 valve closed
1/8/2013	1:11:40 PM	BCl3 valve closed
1/8/2013	1:11:40 PM	PH3 valve closed
1/8/2013	1:11:40 PM	SiCl4 pre valve closed
1/8/2013	1:11:40 PM	SiCl4 post valve closed
1/8/2013	1:11:40 PM	Bypass valve closed
1/8/2013	1:11:40 PM	Bubbler valve closed
1/8/2013	1:11:40 PM	Helium valve opened
1/8/2013	1:11:40 PM	Main Vac valve opened
1/8/2013	1:11:40 PM	Helium MFC set to  20.000000
1/8/2013	1:11:40 PM	H2 MFC set to  0.000000
1/8/2013	1:11:40 PM	BCl3 MFC set to  0.000000
1/8/2013	1:11:40 PM	PH3 MFC set to  0.000000
1/8/2013	1:11:40 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:11:40 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:11:41 PM	Tube furnace set to 150
1/8/2013	1:12:11 PM	Helium valve closed
1/8/2013	1:12:11 PM	H2 valve closed
1/8/2013	1:12:11 PM	BCl3 valve closed
1/8/2013	1:12:11 PM	PH3 valve closed
1/8/2013	1:12:11 PM	SiCl4 pre valve closed
1/8/2013	1:12:11 PM	SiCl4 post valve closed
1/8/2013	1:12:11 PM	Bypass valve closed
1/8/2013	1:12:11 PM	Bubbler valve closed
1/8/2013	1:12:11 PM	Main Vac valve opened
1/8/2013	1:12:11 PM	Helium MFC set to  0.000000
1/8/2013	1:12:11 PM	H2 MFC set to  0.000000
1/8/2013	1:12:11 PM	BCl3 MFC set to  0.000000
1/8/2013	1:12:11 PM	PH3 MFC set to  0.000000
1/8/2013	1:12:11 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:12:11 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:12:11 PM	Tube furnace set to 150
1/8/2013	1:12:41 PM	H2 valve closed
1/8/2013	1:12:41 PM	BCl3 valve closed
1/8/2013	1:12:41 PM	PH3 valve closed
1/8/2013	1:12:41 PM	SiCl4 pre valve closed
1/8/2013	1:12:41 PM	SiCl4 post valve closed
1/8/2013	1:12:41 PM	Bypass valve closed
1/8/2013	1:12:41 PM	Bubbler valve closed
1/8/2013	1:12:41 PM	Helium valve opened
1/8/2013	1:12:41 PM	Main Vac valve opened
1/8/2013	1:12:41 PM	Helium MFC set to  20.000000
1/8/2013	1:12:41 PM	H2 MFC set to  0.000000
1/8/2013	1:12:41 PM	BCl3 MFC set to  0.000000
1/8/2013	1:12:41 PM	PH3 MFC set to  0.000000
1/8/2013	1:12:41 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:12:41 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:12:41 PM	Tube furnace set to 150
1/8/2013	1:13:11 PM	Helium valve closed
1/8/2013	1:13:11 PM	H2 valve closed
1/8/2013	1:13:11 PM	BCl3 valve closed
1/8/2013	1:13:11 PM	PH3 valve closed
1/8/2013	1:13:11 PM	SiCl4 pre valve closed
1/8/2013	1:13:11 PM	SiCl4 post valve closed
1/8/2013	1:13:11 PM	Bypass valve closed
1/8/2013	1:13:11 PM	Bubbler valve closed
1/8/2013	1:13:11 PM	Main Vac valve opened
1/8/2013	1:13:11 PM	Helium MFC set to  0.000000
1/8/2013	1:13:11 PM	H2 MFC set to  0.000000
1/8/2013	1:13:11 PM	BCl3 MFC set to  0.000000
1/8/2013	1:13:11 PM	PH3 MFC set to  0.000000
1/8/2013	1:13:11 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:13:11 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:13:11 PM	Tube furnace set to 150
1/8/2013	1:13:41 PM	H2 valve closed
1/8/2013	1:13:41 PM	BCl3 valve closed
1/8/2013	1:13:41 PM	PH3 valve closed
1/8/2013	1:13:41 PM	SiCl4 pre valve closed
1/8/2013	1:13:41 PM	SiCl4 post valve closed
1/8/2013	1:13:41 PM	Bypass valve closed
1/8/2013	1:13:41 PM	Bubbler valve closed
1/8/2013	1:13:41 PM	Helium valve opened
1/8/2013	1:13:41 PM	Main Vac valve opened
1/8/2013	1:13:41 PM	Helium MFC set to  20.000000
1/8/2013	1:13:41 PM	H2 MFC set to  0.000000
1/8/2013	1:13:41 PM	BCl3 MFC set to  0.000000
1/8/2013	1:13:41 PM	PH3 MFC set to  0.000000
1/8/2013	1:13:41 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:13:41 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:13:42 PM	Tube furnace set to 150
1/8/2013	1:14:12 PM	Helium valve closed
1/8/2013	1:14:12 PM	H2 valve closed
1/8/2013	1:14:12 PM	BCl3 valve closed
1/8/2013	1:14:12 PM	PH3 valve closed
1/8/2013	1:14:12 PM	SiCl4 pre valve closed
1/8/2013	1:14:12 PM	SiCl4 post valve closed
1/8/2013	1:14:12 PM	Bypass valve closed
1/8/2013	1:14:12 PM	Bubbler valve closed
1/8/2013	1:14:12 PM	Main Vac valve opened
1/8/2013	1:14:12 PM	Helium MFC set to  0.000000
1/8/2013	1:14:12 PM	H2 MFC set to  0.000000
1/8/2013	1:14:12 PM	BCl3 MFC set to  0.000000
1/8/2013	1:14:12 PM	PH3 MFC set to  0.000000
1/8/2013	1:14:12 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:14:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:14:12 PM	Tube furnace set to 150
1/8/2013	1:14:42 PM	H2 valve closed
1/8/2013	1:14:42 PM	BCl3 valve closed
1/8/2013	1:14:42 PM	PH3 valve closed
1/8/2013	1:14:42 PM	SiCl4 pre valve closed
1/8/2013	1:14:42 PM	SiCl4 post valve closed
1/8/2013	1:14:42 PM	Bypass valve closed
1/8/2013	1:14:42 PM	Bubbler valve closed
1/8/2013	1:14:42 PM	Helium valve opened
1/8/2013	1:14:42 PM	Main Vac valve opened
1/8/2013	1:14:42 PM	Helium MFC set to  20.000000
1/8/2013	1:14:42 PM	H2 MFC set to  0.000000
1/8/2013	1:14:42 PM	BCl3 MFC set to  0.000000
1/8/2013	1:14:42 PM	PH3 MFC set to  0.000000
1/8/2013	1:14:42 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:14:42 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:14:42 PM	Tube furnace set to 150
1/8/2013	1:15:12 PM	Helium valve closed
1/8/2013	1:15:12 PM	H2 valve closed
1/8/2013	1:15:12 PM	BCl3 valve closed
1/8/2013	1:15:12 PM	PH3 valve closed
1/8/2013	1:15:12 PM	SiCl4 pre valve closed
1/8/2013	1:15:12 PM	SiCl4 post valve closed
1/8/2013	1:15:12 PM	Bypass valve closed
1/8/2013	1:15:12 PM	Bubbler valve closed
1/8/2013	1:15:12 PM	Main Vac valve opened
1/8/2013	1:15:12 PM	Helium MFC set to  0.000000
1/8/2013	1:15:12 PM	H2 MFC set to  0.000000
1/8/2013	1:15:12 PM	BCl3 MFC set to  0.000000
1/8/2013	1:15:12 PM	PH3 MFC set to  0.000000
1/8/2013	1:15:12 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:15:12 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:15:12 PM	Tube furnace set to 150
1/8/2013	1:15:42 PM	H2 valve closed
1/8/2013	1:15:42 PM	BCl3 valve closed
1/8/2013	1:15:42 PM	PH3 valve closed
1/8/2013	1:15:42 PM	SiCl4 pre valve closed
1/8/2013	1:15:42 PM	SiCl4 post valve closed
1/8/2013	1:15:42 PM	Bypass valve closed
1/8/2013	1:15:42 PM	Bubbler valve closed
1/8/2013	1:15:42 PM	Helium valve opened
1/8/2013	1:15:42 PM	Main Vac valve opened
1/8/2013	1:15:42 PM	Helium MFC set to  20.000000
1/8/2013	1:15:42 PM	H2 MFC set to  0.000000
1/8/2013	1:15:42 PM	BCl3 MFC set to  0.000000
1/8/2013	1:15:42 PM	PH3 MFC set to  0.000000
1/8/2013	1:15:42 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:15:42 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:15:43 PM	Tube furnace set to 150
1/8/2013	1:16:13 PM	Helium valve closed
1/8/2013	1:16:13 PM	H2 valve closed
1/8/2013	1:16:13 PM	BCl3 valve closed
1/8/2013	1:16:13 PM	PH3 valve closed
1/8/2013	1:16:13 PM	SiCl4 pre valve closed
1/8/2013	1:16:13 PM	SiCl4 post valve closed
1/8/2013	1:16:13 PM	Bypass valve closed
1/8/2013	1:16:13 PM	Bubbler valve closed
1/8/2013	1:16:13 PM	Main Vac valve opened
1/8/2013	1:16:13 PM	Helium MFC set to  0.000000
1/8/2013	1:16:13 PM	H2 MFC set to  0.000000
1/8/2013	1:16:13 PM	BCl3 MFC set to  0.000000
1/8/2013	1:16:13 PM	PH3 MFC set to  0.000000
1/8/2013	1:16:13 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:16:13 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:16:13 PM	Tube furnace set to 150
1/8/2013	1:16:43 PM	H2 valve closed
1/8/2013	1:16:43 PM	BCl3 valve closed
1/8/2013	1:16:43 PM	PH3 valve closed
1/8/2013	1:16:43 PM	SiCl4 pre valve closed
1/8/2013	1:16:43 PM	SiCl4 post valve closed
1/8/2013	1:16:43 PM	Bypass valve closed
1/8/2013	1:16:43 PM	Bubbler valve closed
1/8/2013	1:16:43 PM	Helium valve opened
1/8/2013	1:16:43 PM	Main Vac valve opened
1/8/2013	1:16:43 PM	Helium MFC set to  20.000000
1/8/2013	1:16:43 PM	H2 MFC set to  0.000000
1/8/2013	1:16:43 PM	BCl3 MFC set to  0.000000
1/8/2013	1:16:43 PM	PH3 MFC set to  0.000000
1/8/2013	1:16:43 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:16:43 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:16:43 PM	Tube furnace set to 150
1/8/2013	1:17:13 PM	Helium valve closed
1/8/2013	1:17:13 PM	H2 valve closed
1/8/2013	1:17:13 PM	BCl3 valve closed
1/8/2013	1:17:13 PM	PH3 valve closed
1/8/2013	1:17:13 PM	SiCl4 pre valve closed
1/8/2013	1:17:13 PM	SiCl4 post valve closed
1/8/2013	1:17:13 PM	Bypass valve closed
1/8/2013	1:17:13 PM	Bubbler valve closed
1/8/2013	1:17:13 PM	Main Vac valve opened
1/8/2013	1:17:13 PM	Helium MFC set to  0.000000
1/8/2013	1:17:13 PM	H2 MFC set to  0.000000
1/8/2013	1:17:13 PM	BCl3 MFC set to  0.000000
1/8/2013	1:17:13 PM	PH3 MFC set to  0.000000
1/8/2013	1:17:13 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:17:13 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:17:13 PM	Tube furnace set to 150
1/8/2013	1:17:14 PM	Run finished at 1:17 PM
1/8/2013	1:24:46 PM	Main Vac valve closed
1/8/2013	1:24:58 PM	Main Vac valve opened
1/8/2013	1:27:42 PM	Main Vac valve closed
1/8/2013	1:27:55 PM	Main Vac valve opened
1/8/2013	1:29:37 PM	Recipe started at 1:29 PM
1/8/2013	1:29:37 PM	Helium valve closed
1/8/2013	1:29:37 PM	H2 valve closed
1/8/2013	1:29:37 PM	BCl3 valve closed
1/8/2013	1:29:37 PM	PH3 valve closed
1/8/2013	1:29:37 PM	SiCl4 pre valve closed
1/8/2013	1:29:37 PM	SiCl4 post valve closed
1/8/2013	1:29:37 PM	Main Vac valve closed
1/8/2013	1:29:37 PM	Bypass valve closed
1/8/2013	1:29:37 PM	Bubbler valve closed
1/8/2013	1:29:37 PM	Helium MFC set to  0.000000
1/8/2013	1:29:37 PM	H2 MFC set to  0.000000
1/8/2013	1:29:37 PM	BCl3 MFC set to  0.000000
1/8/2013	1:29:37 PM	PH3 MFC set to  0.000000
1/8/2013	1:29:37 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:29:37 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:29:37 PM	Tube furnace set to 0
1/8/2013	1:29:40 PM	Helium valve closed
1/8/2013	1:29:40 PM	BCl3 valve closed
1/8/2013	1:29:40 PM	PH3 valve closed
1/8/2013	1:29:40 PM	SiCl4 pre valve closed
1/8/2013	1:29:40 PM	SiCl4 post valve closed
1/8/2013	1:29:40 PM	Main Vac valve closed
1/8/2013	1:29:40 PM	Bypass valve closed
1/8/2013	1:29:40 PM	Bubbler valve closed
1/8/2013	1:29:40 PM	H2 valve opened
1/8/2013	1:29:40 PM	Helium MFC set to  0.000000
1/8/2013	1:29:40 PM	H2 MFC set to  500.000000
1/8/2013	1:29:40 PM	BCl3 MFC set to  0.000000
1/8/2013	1:29:40 PM	PH3 MFC set to  0.000000
1/8/2013	1:29:40 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:29:40 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:29:40 PM	Tube furnace set to 0
1/8/2013	1:30:52 PM	Helium valve closed
1/8/2013	1:30:52 PM	BCl3 valve closed
1/8/2013	1:30:52 PM	PH3 valve closed
1/8/2013	1:30:52 PM	SiCl4 pre valve closed
1/8/2013	1:30:52 PM	SiCl4 post valve closed
1/8/2013	1:30:52 PM	Main Vac valve closed
1/8/2013	1:30:52 PM	Bypass valve closed
1/8/2013	1:30:52 PM	H2 valve opened
1/8/2013	1:30:52 PM	Bubbler valve opened
1/8/2013	1:30:52 PM	Helium MFC set to  0.000000
1/8/2013	1:30:52 PM	H2 MFC set to  500.000000
1/8/2013	1:30:52 PM	BCl3 MFC set to  0.000000
1/8/2013	1:30:52 PM	PH3 MFC set to  0.000000
1/8/2013	1:30:52 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:30:52 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:30:52 PM	Tube furnace set to 0
1/8/2013	1:30:53 PM	Helium valve closed
1/8/2013	1:30:53 PM	BCl3 valve closed
1/8/2013	1:30:53 PM	PH3 valve closed
1/8/2013	1:30:53 PM	SiCl4 pre valve closed
1/8/2013	1:30:53 PM	SiCl4 post valve closed
1/8/2013	1:30:53 PM	Main Vac valve closed
1/8/2013	1:30:53 PM	Bypass valve closed
1/8/2013	1:30:53 PM	H2 valve opened
1/8/2013	1:30:53 PM	Bubbler valve opened
1/8/2013	1:30:53 PM	Helium MFC set to  0.000000
1/8/2013	1:30:53 PM	H2 MFC set to  500.000000
1/8/2013	1:30:53 PM	BCl3 MFC set to  0.000000
1/8/2013	1:30:53 PM	PH3 MFC set to  0.000000
1/8/2013	1:30:53 PM	SiCl4 MFC set to  0.000000
1/8/2013	1:30:53 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:30:53 PM	Tube furnace set to 1000
1/8/2013	1:50:53 PM	Helium valve closed
1/8/2013	1:50:53 PM	BCl3 valve closed
1/8/2013	1:50:53 PM	Main Vac valve closed
1/8/2013	1:50:53 PM	Bypass valve closed
1/8/2013	1:50:53 PM	H2 valve opened
1/8/2013	1:50:53 PM	PH3 valve opened
1/8/2013	1:50:53 PM	SiCl4 pre valve opened
1/8/2013	1:50:53 PM	SiCl4 post valve opened
1/8/2013	1:50:53 PM	Bubbler valve opened
1/8/2013	1:50:53 PM	Helium MFC set to  0.000000
1/8/2013	1:50:53 PM	H2 MFC set to  500.000000
1/8/2013	1:50:53 PM	BCl3 MFC set to  0.000000
1/8/2013	1:50:53 PM	PH3 MFC set to  0.300000
1/8/2013	1:50:53 PM	SiCl4 MFC set to  50.000000
1/8/2013	1:50:53 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	1:50:53 PM	Tube furnace set to 1000
1/8/2013	2:10:53 PM	Helium valve closed
1/8/2013	2:10:53 PM	BCl3 valve closed
1/8/2013	2:10:53 PM	PH3 valve closed
1/8/2013	2:10:53 PM	SiCl4 pre valve closed
1/8/2013	2:10:53 PM	SiCl4 post valve closed
1/8/2013	2:10:53 PM	Main Vac valve closed
1/8/2013	2:10:53 PM	Bypass valve closed
1/8/2013	2:10:53 PM	H2 valve opened
1/8/2013	2:10:53 PM	Bubbler valve opened
1/8/2013	2:10:53 PM	Helium MFC set to  0.000000
1/8/2013	2:10:54 PM	H2 MFC set to  500.000000
1/8/2013	2:10:54 PM	BCl3 MFC set to  0.000000
1/8/2013	2:10:54 PM	PH3 MFC set to  0.000000
1/8/2013	2:10:54 PM	SiCl4 MFC set to  0.000000
1/8/2013	2:10:54 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	2:10:54 PM	Tube furnace set to 950
1/8/2013	2:13:54 PM	H2 valve closed
1/8/2013	2:13:54 PM	BCl3 valve closed
1/8/2013	2:13:54 PM	PH3 valve closed
1/8/2013	2:13:54 PM	SiCl4 pre valve closed
1/8/2013	2:13:54 PM	SiCl4 post valve closed
1/8/2013	2:13:54 PM	Main Vac valve closed
1/8/2013	2:13:54 PM	Bypass valve closed
1/8/2013	2:13:54 PM	Helium valve opened
1/8/2013	2:13:54 PM	Bubbler valve opened
1/8/2013	2:13:54 PM	Helium MFC set to  500.000000
1/8/2013	2:13:54 PM	H2 MFC set to  0.000000
1/8/2013	2:13:54 PM	BCl3 MFC set to  0.000000
1/8/2013	2:13:54 PM	PH3 MFC set to  0.000000
1/8/2013	2:13:54 PM	SiCl4 MFC set to  0.000000
1/8/2013	2:13:54 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	2:13:54 PM	Tube furnace set to 900
1/8/2013	2:16:54 PM	H2 valve closed
1/8/2013	2:16:54 PM	BCl3 valve closed
1/8/2013	2:16:54 PM	PH3 valve closed
1/8/2013	2:16:54 PM	SiCl4 pre valve closed
1/8/2013	2:16:54 PM	SiCl4 post valve closed
1/8/2013	2:16:54 PM	Main Vac valve closed
1/8/2013	2:16:54 PM	Bypass valve closed
1/8/2013	2:16:54 PM	Helium valve opened
1/8/2013	2:16:54 PM	Bubbler valve opened
1/8/2013	2:16:54 PM	Helium MFC set to  500.000000
1/8/2013	2:16:54 PM	H2 MFC set to  0.000000
1/8/2013	2:16:54 PM	BCl3 MFC set to  0.000000
1/8/2013	2:16:54 PM	PH3 MFC set to  0.000000
1/8/2013	2:16:54 PM	SiCl4 MFC set to  0.000000
1/8/2013	2:16:54 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	2:16:54 PM	Tube furnace set to 850
1/8/2013	2:19:54 PM	H2 valve closed
1/8/2013	2:19:54 PM	BCl3 valve closed
1/8/2013	2:19:54 PM	PH3 valve closed
1/8/2013	2:19:54 PM	SiCl4 pre valve closed
1/8/2013	2:19:54 PM	SiCl4 post valve closed
1/8/2013	2:19:54 PM	Main Vac valve closed
1/8/2013	2:19:54 PM	Bypass valve closed
1/8/2013	2:19:54 PM	Helium valve opened
1/8/2013	2:19:54 PM	Bubbler valve opened
1/8/2013	2:19:54 PM	Helium MFC set to  500.000000
1/8/2013	2:19:54 PM	H2 MFC set to  0.000000
1/8/2013	2:19:54 PM	BCl3 MFC set to  0.000000
1/8/2013	2:19:54 PM	PH3 MFC set to  0.000000
1/8/2013	2:19:54 PM	SiCl4 MFC set to  0.000000
1/8/2013	2:19:54 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	2:19:54 PM	Tube furnace set to 800
1/8/2013	2:22:54 PM	H2 valve closed
1/8/2013	2:22:54 PM	BCl3 valve closed
1/8/2013	2:22:54 PM	PH3 valve closed
1/8/2013	2:22:54 PM	SiCl4 pre valve closed
1/8/2013	2:22:54 PM	SiCl4 post valve closed
1/8/2013	2:22:54 PM	Main Vac valve closed
1/8/2013	2:22:54 PM	Bypass valve closed
1/8/2013	2:22:54 PM	Helium valve opened
1/8/2013	2:22:54 PM	Bubbler valve opened
1/8/2013	2:22:54 PM	Helium MFC set to  500.000000
1/8/2013	2:22:54 PM	H2 MFC set to  0.000000
1/8/2013	2:22:54 PM	BCl3 MFC set to  0.000000
1/8/2013	2:22:54 PM	PH3 MFC set to  0.000000
1/8/2013	2:22:54 PM	SiCl4 MFC set to  0.000000
1/8/2013	2:22:54 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	2:22:55 PM	Tube furnace set to 750
1/8/2013	2:25:55 PM	H2 valve closed
1/8/2013	2:25:55 PM	BCl3 valve closed
1/8/2013	2:25:55 PM	PH3 valve closed
1/8/2013	2:25:55 PM	SiCl4 pre valve closed
1/8/2013	2:25:55 PM	SiCl4 post valve closed
1/8/2013	2:25:55 PM	Main Vac valve closed
1/8/2013	2:25:55 PM	Bypass valve closed
1/8/2013	2:25:55 PM	Helium valve opened
1/8/2013	2:25:55 PM	Bubbler valve opened
1/8/2013	2:25:55 PM	Helium MFC set to  500.000000
1/8/2013	2:25:55 PM	H2 MFC set to  0.000000
1/8/2013	2:25:55 PM	BCl3 MFC set to  0.000000
1/8/2013	2:25:55 PM	PH3 MFC set to  0.000000
1/8/2013	2:25:55 PM	SiCl4 MFC set to  0.000000
1/8/2013	2:25:55 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	2:25:55 PM	Tube furnace set to 0
1/8/2013	2:45:55 PM	Helium valve closed
1/8/2013	2:45:55 PM	H2 valve closed
1/8/2013	2:45:55 PM	BCl3 valve closed
1/8/2013	2:45:55 PM	PH3 valve closed
1/8/2013	2:45:55 PM	SiCl4 pre valve closed
1/8/2013	2:45:55 PM	SiCl4 post valve closed
1/8/2013	2:45:55 PM	Main Vac valve closed
1/8/2013	2:45:55 PM	Bypass valve closed
1/8/2013	2:45:55 PM	Bubbler valve closed
1/8/2013	2:45:55 PM	Helium MFC set to  0.000000
1/8/2013	2:45:55 PM	H2 MFC set to  0.000000
1/8/2013	2:45:55 PM	BCl3 MFC set to  0.000000
1/8/2013	2:45:55 PM	PH3 MFC set to  0.000000
1/8/2013	2:45:55 PM	SiCl4 MFC set to  0.000000
1/8/2013	2:45:55 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	2:45:55 PM	Tube furnace set to 0
1/8/2013	2:45:56 PM	Run finished at 2:45 PM
1/8/2013	3:36:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	3:36:37 PM	Recipe started at 3:36 PM
1/8/2013	3:36:37 PM	Helium valve closed
1/8/2013	3:36:37 PM	H2 valve closed
1/8/2013	3:36:37 PM	BCl3 valve closed
1/8/2013	3:36:37 PM	PH3 valve closed
1/8/2013	3:36:37 PM	SiCl4 pre valve closed
1/8/2013	3:36:37 PM	SiCl4 post valve closed
1/8/2013	3:36:37 PM	Main Vac valve closed
1/8/2013	3:36:37 PM	Bypass valve closed
1/8/2013	3:36:37 PM	Bubbler valve closed
1/8/2013	3:36:37 PM	Helium MFC set to  0.000000
1/8/2013	3:36:37 PM	H2 MFC set to  0.000000
1/8/2013	3:36:37 PM	BCl3 MFC set to  0.000000
1/8/2013	3:36:37 PM	PH3 MFC set to  0.000000
1/8/2013	3:36:37 PM	SiCl4 MFC set to  0.000000
1/8/2013	3:36:37 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	3:36:37 PM	Tube furnace set to 0
1/8/2013	3:36:40 PM	H2 valve closed
1/8/2013	3:36:40 PM	BCl3 valve closed
1/8/2013	3:36:40 PM	PH3 valve closed
1/8/2013	3:36:40 PM	SiCl4 pre valve closed
1/8/2013	3:36:40 PM	SiCl4 post valve closed
1/8/2013	3:36:40 PM	Main Vac valve closed
1/8/2013	3:36:41 PM	Bypass valve closed
1/8/2013	3:36:41 PM	Bubbler valve closed
1/8/2013	3:36:41 PM	Helium valve opened
1/8/2013	3:36:41 PM	Helium MFC set to  500.000000
1/8/2013	3:36:41 PM	H2 MFC set to  0.000000
1/8/2013	3:36:41 PM	BCl3 MFC set to  0.000000
1/8/2013	3:36:41 PM	PH3 MFC set to  0.000000
1/8/2013	3:36:41 PM	SiCl4 MFC set to  0.000000
1/8/2013	3:36:41 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	3:36:41 PM	Tube furnace set to 0
1/8/2013	3:36:44 PM	Helium valve closed
1/8/2013	3:36:44 PM	H2 valve closed
1/8/2013	3:36:44 PM	BCl3 valve closed
1/8/2013	3:36:44 PM	PH3 valve closed
1/8/2013	3:36:44 PM	SiCl4 pre valve closed
1/8/2013	3:36:44 PM	SiCl4 post valve closed
1/8/2013	3:36:44 PM	Main Vac valve closed
1/8/2013	3:36:44 PM	Bypass valve closed
1/8/2013	3:36:44 PM	Bubbler valve closed
1/8/2013	3:36:44 PM	Helium MFC set to  0.000000
1/8/2013	3:36:44 PM	H2 MFC set to  0.000000
1/8/2013	3:36:44 PM	BCl3 MFC set to  0.000000
1/8/2013	3:36:44 PM	PH3 MFC set to  0.000000
1/8/2013	3:36:44 PM	SiCl4 MFC set to  0.000000
1/8/2013	3:36:44 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	3:36:44 PM	Tube furnace set to 0
1/8/2013	3:36:45 PM	Run finished at 3:36 PM
1/8/2013	3:36:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	3:52:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	3:52:54 PM	Recipe started at 3:52 PM
1/8/2013	3:52:54 PM	Helium valve closed
1/8/2013	3:52:54 PM	H2 valve closed
1/8/2013	3:52:54 PM	BCl3 valve closed
1/8/2013	3:52:54 PM	PH3 valve closed
1/8/2013	3:52:54 PM	SiCl4 pre valve closed
1/8/2013	3:52:54 PM	SiCl4 post valve closed
1/8/2013	3:52:54 PM	Main Vac valve closed
1/8/2013	3:52:54 PM	Bubbler valve closed
1/8/2013	3:52:54 PM	Bypass valve opened
1/8/2013	3:52:54 PM	Helium MFC set to  0.000000
1/8/2013	3:52:54 PM	H2 MFC set to  0.000000
1/8/2013	3:52:54 PM	BCl3 MFC set to  0.000000
1/8/2013	3:52:54 PM	PH3 MFC set to  0.000000
1/8/2013	3:52:54 PM	SiCl4 MFC set to  0.000000
1/8/2013	3:52:54 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	3:52:54 PM	Tube furnace set to 0
1/8/2013	3:54:20 PM	Helium valve closed
1/8/2013	3:54:20 PM	H2 valve closed
1/8/2013	3:54:20 PM	BCl3 valve closed
1/8/2013	3:54:20 PM	PH3 valve closed
1/8/2013	3:54:21 PM	SiCl4 pre valve closed
1/8/2013	3:54:21 PM	SiCl4 post valve closed
1/8/2013	3:54:21 PM	Main Vac valve closed
1/8/2013	3:54:21 PM	Bubbler valve closed
1/8/2013	3:54:21 PM	Bypass valve opened
1/8/2013	3:54:21 PM	Helium MFC set to  0.000000
1/8/2013	3:54:21 PM	H2 MFC set to  0.000000
1/8/2013	3:54:21 PM	BCl3 MFC set to  0.000000
1/8/2013	3:54:21 PM	PH3 MFC set to  0.000000
1/8/2013	3:54:21 PM	SiCl4 MFC set to  0.000000
1/8/2013	3:54:21 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	3:54:21 PM	Tube furnace set to 0
1/8/2013	3:55:21 PM	Helium valve closed
1/8/2013	3:55:21 PM	H2 valve closed
1/8/2013	3:55:21 PM	BCl3 valve closed
1/8/2013	3:55:21 PM	PH3 valve closed
1/8/2013	3:55:21 PM	SiCl4 pre valve closed
1/8/2013	3:55:21 PM	SiCl4 post valve closed
1/8/2013	3:55:21 PM	Bypass valve closed
1/8/2013	3:55:21 PM	Bubbler valve closed
1/8/2013	3:55:21 PM	Main Vac valve opened
1/8/2013	3:55:21 PM	Helium MFC set to  0.000000
1/8/2013	3:55:21 PM	H2 MFC set to  0.000000
1/8/2013	3:55:21 PM	BCl3 MFC set to  0.000000
1/8/2013	3:55:21 PM	PH3 MFC set to  0.000000
1/8/2013	3:55:21 PM	SiCl4 MFC set to  0.000000
1/8/2013	3:55:21 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	3:55:21 PM	Tube furnace set to 0
1/8/2013	3:55:22 PM	Run finished at 3:55 PM
1/8/2013	3:55:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	4:14:03 PM	Tube furnace set to 150
1/8/2013	4:37:15 PM	Recipe started at 4:37 PM
1/8/2013	4:37:15 PM	Helium valve closed
1/8/2013	4:37:15 PM	H2 valve closed
1/8/2013	4:37:15 PM	BCl3 valve closed
1/8/2013	4:37:15 PM	PH3 valve closed
1/8/2013	4:37:15 PM	SiCl4 pre valve closed
1/8/2013	4:37:15 PM	SiCl4 post valve closed
1/8/2013	4:37:15 PM	Bypass valve closed
1/8/2013	4:37:15 PM	Bubbler valve closed
1/8/2013	4:37:15 PM	Main Vac valve opened
1/8/2013	4:37:15 PM	Helium MFC set to  0.000000
1/8/2013	4:37:16 PM	H2 MFC set to  0.000000
1/8/2013	4:37:16 PM	BCl3 MFC set to  0.000000
1/8/2013	4:37:16 PM	PH3 MFC set to  0.000000
1/8/2013	4:37:16 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:37:16 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:37:16 PM	Tube furnace set to 150
1/8/2013	4:37:46 PM	H2 valve closed
1/8/2013	4:37:46 PM	BCl3 valve closed
1/8/2013	4:37:46 PM	PH3 valve closed
1/8/2013	4:37:46 PM	SiCl4 pre valve closed
1/8/2013	4:37:46 PM	SiCl4 post valve closed
1/8/2013	4:37:46 PM	Bypass valve closed
1/8/2013	4:37:46 PM	Bubbler valve closed
1/8/2013	4:37:46 PM	Helium valve opened
1/8/2013	4:37:46 PM	Main Vac valve opened
1/8/2013	4:37:46 PM	Helium MFC set to  20.000000
1/8/2013	4:37:46 PM	H2 MFC set to  0.000000
1/8/2013	4:37:46 PM	BCl3 MFC set to  0.000000
1/8/2013	4:37:46 PM	PH3 MFC set to  0.000000
1/8/2013	4:37:46 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:37:46 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:37:46 PM	Tube furnace set to 150
1/8/2013	4:38:16 PM	Helium valve closed
1/8/2013	4:38:16 PM	H2 valve closed
1/8/2013	4:38:16 PM	BCl3 valve closed
1/8/2013	4:38:16 PM	PH3 valve closed
1/8/2013	4:38:16 PM	SiCl4 pre valve closed
1/8/2013	4:38:16 PM	SiCl4 post valve closed
1/8/2013	4:38:16 PM	Bypass valve closed
1/8/2013	4:38:16 PM	Bubbler valve closed
1/8/2013	4:38:16 PM	Main Vac valve opened
1/8/2013	4:38:16 PM	Helium MFC set to  0.000000
1/8/2013	4:38:16 PM	H2 MFC set to  0.000000
1/8/2013	4:38:16 PM	BCl3 MFC set to  0.000000
1/8/2013	4:38:16 PM	PH3 MFC set to  0.000000
1/8/2013	4:38:16 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:38:16 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:38:16 PM	Tube furnace set to 150
1/8/2013	4:38:46 PM	H2 valve closed
1/8/2013	4:38:46 PM	BCl3 valve closed
1/8/2013	4:38:46 PM	PH3 valve closed
1/8/2013	4:38:46 PM	SiCl4 pre valve closed
1/8/2013	4:38:46 PM	SiCl4 post valve closed
1/8/2013	4:38:46 PM	Bypass valve closed
1/8/2013	4:38:46 PM	Bubbler valve closed
1/8/2013	4:38:46 PM	Helium valve opened
1/8/2013	4:38:46 PM	Main Vac valve opened
1/8/2013	4:38:46 PM	Helium MFC set to  20.000000
1/8/2013	4:38:46 PM	H2 MFC set to  0.000000
1/8/2013	4:38:46 PM	BCl3 MFC set to  0.000000
1/8/2013	4:38:46 PM	PH3 MFC set to  0.000000
1/8/2013	4:38:46 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:38:46 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:38:46 PM	Tube furnace set to 150
1/8/2013	4:39:16 PM	Helium valve closed
1/8/2013	4:39:16 PM	H2 valve closed
1/8/2013	4:39:16 PM	BCl3 valve closed
1/8/2013	4:39:16 PM	PH3 valve closed
1/8/2013	4:39:16 PM	SiCl4 pre valve closed
1/8/2013	4:39:16 PM	SiCl4 post valve closed
1/8/2013	4:39:16 PM	Bypass valve closed
1/8/2013	4:39:16 PM	Bubbler valve closed
1/8/2013	4:39:16 PM	Main Vac valve opened
1/8/2013	4:39:16 PM	Helium MFC set to  0.000000
1/8/2013	4:39:16 PM	H2 MFC set to  0.000000
1/8/2013	4:39:16 PM	BCl3 MFC set to  0.000000
1/8/2013	4:39:16 PM	PH3 MFC set to  0.000000
1/8/2013	4:39:16 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:39:17 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:39:17 PM	Tube furnace set to 150
1/8/2013	4:39:47 PM	H2 valve closed
1/8/2013	4:39:47 PM	BCl3 valve closed
1/8/2013	4:39:47 PM	PH3 valve closed
1/8/2013	4:39:47 PM	SiCl4 pre valve closed
1/8/2013	4:39:47 PM	SiCl4 post valve closed
1/8/2013	4:39:47 PM	Bypass valve closed
1/8/2013	4:39:47 PM	Bubbler valve closed
1/8/2013	4:39:47 PM	Helium valve opened
1/8/2013	4:39:47 PM	Main Vac valve opened
1/8/2013	4:39:47 PM	Helium MFC set to  20.000000
1/8/2013	4:39:47 PM	H2 MFC set to  0.000000
1/8/2013	4:39:47 PM	BCl3 MFC set to  0.000000
1/8/2013	4:39:47 PM	PH3 MFC set to  0.000000
1/8/2013	4:39:47 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:39:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:39:47 PM	Tube furnace set to 150
1/8/2013	4:40:17 PM	Helium valve closed
1/8/2013	4:40:17 PM	H2 valve closed
1/8/2013	4:40:17 PM	BCl3 valve closed
1/8/2013	4:40:17 PM	PH3 valve closed
1/8/2013	4:40:17 PM	SiCl4 pre valve closed
1/8/2013	4:40:17 PM	SiCl4 post valve closed
1/8/2013	4:40:17 PM	Bypass valve closed
1/8/2013	4:40:17 PM	Bubbler valve closed
1/8/2013	4:40:17 PM	Main Vac valve opened
1/8/2013	4:40:17 PM	Helium MFC set to  0.000000
1/8/2013	4:40:17 PM	H2 MFC set to  0.000000
1/8/2013	4:40:17 PM	BCl3 MFC set to  0.000000
1/8/2013	4:40:17 PM	PH3 MFC set to  0.000000
1/8/2013	4:40:17 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:40:17 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:40:17 PM	Tube furnace set to 150
1/8/2013	4:40:47 PM	H2 valve closed
1/8/2013	4:40:47 PM	BCl3 valve closed
1/8/2013	4:40:47 PM	PH3 valve closed
1/8/2013	4:40:47 PM	SiCl4 pre valve closed
1/8/2013	4:40:47 PM	SiCl4 post valve closed
1/8/2013	4:40:47 PM	Bypass valve closed
1/8/2013	4:40:47 PM	Bubbler valve closed
1/8/2013	4:40:47 PM	Helium valve opened
1/8/2013	4:40:47 PM	Main Vac valve opened
1/8/2013	4:40:47 PM	Helium MFC set to  20.000000
1/8/2013	4:40:47 PM	H2 MFC set to  0.000000
1/8/2013	4:40:47 PM	BCl3 MFC set to  0.000000
1/8/2013	4:40:47 PM	PH3 MFC set to  0.000000
1/8/2013	4:40:47 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:40:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:40:47 PM	Tube furnace set to 150
1/8/2013	4:41:17 PM	Helium valve closed
1/8/2013	4:41:17 PM	H2 valve closed
1/8/2013	4:41:17 PM	BCl3 valve closed
1/8/2013	4:41:17 PM	PH3 valve closed
1/8/2013	4:41:17 PM	SiCl4 pre valve closed
1/8/2013	4:41:17 PM	SiCl4 post valve closed
1/8/2013	4:41:17 PM	Bypass valve closed
1/8/2013	4:41:17 PM	Bubbler valve closed
1/8/2013	4:41:17 PM	Main Vac valve opened
1/8/2013	4:41:17 PM	Helium MFC set to  0.000000
1/8/2013	4:41:17 PM	H2 MFC set to  0.000000
1/8/2013	4:41:17 PM	BCl3 MFC set to  0.000000
1/8/2013	4:41:17 PM	PH3 MFC set to  0.000000
1/8/2013	4:41:17 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:41:17 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:41:18 PM	Tube furnace set to 150
1/8/2013	4:41:48 PM	H2 valve closed
1/8/2013	4:41:48 PM	BCl3 valve closed
1/8/2013	4:41:48 PM	PH3 valve closed
1/8/2013	4:41:48 PM	SiCl4 pre valve closed
1/8/2013	4:41:48 PM	SiCl4 post valve closed
1/8/2013	4:41:48 PM	Bypass valve closed
1/8/2013	4:41:48 PM	Bubbler valve closed
1/8/2013	4:41:48 PM	Helium valve opened
1/8/2013	4:41:48 PM	Main Vac valve opened
1/8/2013	4:41:48 PM	Helium MFC set to  20.000000
1/8/2013	4:41:48 PM	H2 MFC set to  0.000000
1/8/2013	4:41:48 PM	BCl3 MFC set to  0.000000
1/8/2013	4:41:48 PM	PH3 MFC set to  0.000000
1/8/2013	4:41:48 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:41:48 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:41:48 PM	Tube furnace set to 150
1/8/2013	4:42:18 PM	Helium valve closed
1/8/2013	4:42:18 PM	H2 valve closed
1/8/2013	4:42:18 PM	BCl3 valve closed
1/8/2013	4:42:18 PM	PH3 valve closed
1/8/2013	4:42:18 PM	SiCl4 pre valve closed
1/8/2013	4:42:18 PM	SiCl4 post valve closed
1/8/2013	4:42:18 PM	Bypass valve closed
1/8/2013	4:42:18 PM	Bubbler valve closed
1/8/2013	4:42:18 PM	Main Vac valve opened
1/8/2013	4:42:18 PM	Helium MFC set to  0.000000
1/8/2013	4:42:18 PM	H2 MFC set to  0.000000
1/8/2013	4:42:18 PM	BCl3 MFC set to  0.000000
1/8/2013	4:42:18 PM	PH3 MFC set to  0.000000
1/8/2013	4:42:18 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:42:18 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:42:18 PM	Tube furnace set to 150
1/8/2013	4:42:48 PM	H2 valve closed
1/8/2013	4:42:48 PM	BCl3 valve closed
1/8/2013	4:42:48 PM	PH3 valve closed
1/8/2013	4:42:48 PM	SiCl4 pre valve closed
1/8/2013	4:42:48 PM	SiCl4 post valve closed
1/8/2013	4:42:48 PM	Bypass valve closed
1/8/2013	4:42:48 PM	Bubbler valve closed
1/8/2013	4:42:48 PM	Helium valve opened
1/8/2013	4:42:48 PM	Main Vac valve opened
1/8/2013	4:42:48 PM	Helium MFC set to  20.000000
1/8/2013	4:42:48 PM	H2 MFC set to  0.000000
1/8/2013	4:42:48 PM	BCl3 MFC set to  0.000000
1/8/2013	4:42:48 PM	PH3 MFC set to  0.000000
1/8/2013	4:42:48 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:42:48 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:42:48 PM	Tube furnace set to 150
1/8/2013	4:43:18 PM	Helium valve closed
1/8/2013	4:43:18 PM	H2 valve closed
1/8/2013	4:43:18 PM	BCl3 valve closed
1/8/2013	4:43:18 PM	PH3 valve closed
1/8/2013	4:43:18 PM	SiCl4 pre valve closed
1/8/2013	4:43:18 PM	SiCl4 post valve closed
1/8/2013	4:43:18 PM	Bypass valve closed
1/8/2013	4:43:18 PM	Bubbler valve closed
1/8/2013	4:43:18 PM	Main Vac valve opened
1/8/2013	4:43:18 PM	Helium MFC set to  0.000000
1/8/2013	4:43:18 PM	H2 MFC set to  0.000000
1/8/2013	4:43:18 PM	BCl3 MFC set to  0.000000
1/8/2013	4:43:18 PM	PH3 MFC set to  0.000000
1/8/2013	4:43:18 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:43:18 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:43:19 PM	Tube furnace set to 150
1/8/2013	4:43:49 PM	H2 valve closed
1/8/2013	4:43:49 PM	BCl3 valve closed
1/8/2013	4:43:49 PM	PH3 valve closed
1/8/2013	4:43:49 PM	SiCl4 pre valve closed
1/8/2013	4:43:49 PM	SiCl4 post valve closed
1/8/2013	4:43:49 PM	Bypass valve closed
1/8/2013	4:43:49 PM	Bubbler valve closed
1/8/2013	4:43:49 PM	Helium valve opened
1/8/2013	4:43:49 PM	Main Vac valve opened
1/8/2013	4:43:49 PM	Helium MFC set to  20.000000
1/8/2013	4:43:49 PM	H2 MFC set to  0.000000
1/8/2013	4:43:49 PM	BCl3 MFC set to  0.000000
1/8/2013	4:43:49 PM	PH3 MFC set to  0.000000
1/8/2013	4:43:49 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:43:49 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:43:49 PM	Tube furnace set to 150
1/8/2013	4:44:19 PM	Helium valve closed
1/8/2013	4:44:19 PM	H2 valve closed
1/8/2013	4:44:19 PM	BCl3 valve closed
1/8/2013	4:44:19 PM	PH3 valve closed
1/8/2013	4:44:19 PM	SiCl4 pre valve closed
1/8/2013	4:44:19 PM	SiCl4 post valve closed
1/8/2013	4:44:19 PM	Bypass valve closed
1/8/2013	4:44:19 PM	Bubbler valve closed
1/8/2013	4:44:19 PM	Main Vac valve opened
1/8/2013	4:44:19 PM	Helium MFC set to  0.000000
1/8/2013	4:44:19 PM	H2 MFC set to  0.000000
1/8/2013	4:44:19 PM	BCl3 MFC set to  0.000000
1/8/2013	4:44:19 PM	PH3 MFC set to  0.000000
1/8/2013	4:44:19 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:44:19 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:44:19 PM	Tube furnace set to 150
1/8/2013	4:44:49 PM	H2 valve closed
1/8/2013	4:44:49 PM	BCl3 valve closed
1/8/2013	4:44:49 PM	PH3 valve closed
1/8/2013	4:44:49 PM	SiCl4 pre valve closed
1/8/2013	4:44:49 PM	SiCl4 post valve closed
1/8/2013	4:44:49 PM	Bypass valve closed
1/8/2013	4:44:49 PM	Bubbler valve closed
1/8/2013	4:44:49 PM	Helium valve opened
1/8/2013	4:44:49 PM	Main Vac valve opened
1/8/2013	4:44:49 PM	Helium MFC set to  20.000000
1/8/2013	4:44:49 PM	H2 MFC set to  0.000000
1/8/2013	4:44:49 PM	BCl3 MFC set to  0.000000
1/8/2013	4:44:49 PM	PH3 MFC set to  0.000000
1/8/2013	4:44:49 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:44:49 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:44:49 PM	Tube furnace set to 150
1/8/2013	4:45:19 PM	Helium valve closed
1/8/2013	4:45:19 PM	H2 valve closed
1/8/2013	4:45:19 PM	BCl3 valve closed
1/8/2013	4:45:19 PM	PH3 valve closed
1/8/2013	4:45:19 PM	SiCl4 pre valve closed
1/8/2013	4:45:19 PM	SiCl4 post valve closed
1/8/2013	4:45:19 PM	Bypass valve closed
1/8/2013	4:45:19 PM	Bubbler valve closed
1/8/2013	4:45:19 PM	Main Vac valve opened
1/8/2013	4:45:19 PM	Helium MFC set to  0.000000
1/8/2013	4:45:19 PM	H2 MFC set to  0.000000
1/8/2013	4:45:19 PM	BCl3 MFC set to  0.000000
1/8/2013	4:45:19 PM	PH3 MFC set to  0.000000
1/8/2013	4:45:19 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:45:19 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:45:20 PM	Tube furnace set to 150
1/8/2013	4:45:50 PM	H2 valve closed
1/8/2013	4:45:50 PM	BCl3 valve closed
1/8/2013	4:45:50 PM	PH3 valve closed
1/8/2013	4:45:50 PM	SiCl4 pre valve closed
1/8/2013	4:45:50 PM	SiCl4 post valve closed
1/8/2013	4:45:50 PM	Bypass valve closed
1/8/2013	4:45:50 PM	Bubbler valve closed
1/8/2013	4:45:50 PM	Helium valve opened
1/8/2013	4:45:50 PM	Main Vac valve opened
1/8/2013	4:45:50 PM	Helium MFC set to  20.000000
1/8/2013	4:45:50 PM	H2 MFC set to  0.000000
1/8/2013	4:45:50 PM	BCl3 MFC set to  0.000000
1/8/2013	4:45:50 PM	PH3 MFC set to  0.000000
1/8/2013	4:45:50 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:45:50 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:45:50 PM	Tube furnace set to 150
1/8/2013	4:46:20 PM	Helium valve closed
1/8/2013	4:46:20 PM	H2 valve closed
1/8/2013	4:46:20 PM	BCl3 valve closed
1/8/2013	4:46:20 PM	PH3 valve closed
1/8/2013	4:46:20 PM	SiCl4 pre valve closed
1/8/2013	4:46:20 PM	SiCl4 post valve closed
1/8/2013	4:46:20 PM	Bypass valve closed
1/8/2013	4:46:20 PM	Bubbler valve closed
1/8/2013	4:46:20 PM	Main Vac valve opened
1/8/2013	4:46:20 PM	Helium MFC set to  0.000000
1/8/2013	4:46:20 PM	H2 MFC set to  0.000000
1/8/2013	4:46:20 PM	BCl3 MFC set to  0.000000
1/8/2013	4:46:20 PM	PH3 MFC set to  0.000000
1/8/2013	4:46:20 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:46:20 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:46:20 PM	Tube furnace set to 150
1/8/2013	4:46:50 PM	H2 valve closed
1/8/2013	4:46:50 PM	BCl3 valve closed
1/8/2013	4:46:50 PM	PH3 valve closed
1/8/2013	4:46:50 PM	SiCl4 pre valve closed
1/8/2013	4:46:50 PM	SiCl4 post valve closed
1/8/2013	4:46:50 PM	Bypass valve closed
1/8/2013	4:46:50 PM	Bubbler valve closed
1/8/2013	4:46:50 PM	Helium valve opened
1/8/2013	4:46:50 PM	Main Vac valve opened
1/8/2013	4:46:50 PM	Helium MFC set to  20.000000
1/8/2013	4:46:50 PM	H2 MFC set to  0.000000
1/8/2013	4:46:50 PM	BCl3 MFC set to  0.000000
1/8/2013	4:46:50 PM	PH3 MFC set to  0.000000
1/8/2013	4:46:50 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:46:50 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:46:50 PM	Tube furnace set to 150
1/8/2013	4:47:20 PM	Helium valve closed
1/8/2013	4:47:20 PM	H2 valve closed
1/8/2013	4:47:20 PM	BCl3 valve closed
1/8/2013	4:47:20 PM	PH3 valve closed
1/8/2013	4:47:20 PM	SiCl4 pre valve closed
1/8/2013	4:47:20 PM	SiCl4 post valve closed
1/8/2013	4:47:20 PM	Bypass valve closed
1/8/2013	4:47:20 PM	Bubbler valve closed
1/8/2013	4:47:20 PM	Main Vac valve opened
1/8/2013	4:47:20 PM	Helium MFC set to  0.000000
1/8/2013	4:47:20 PM	H2 MFC set to  0.000000
1/8/2013	4:47:20 PM	BCl3 MFC set to  0.000000
1/8/2013	4:47:20 PM	PH3 MFC set to  0.000000
1/8/2013	4:47:20 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:47:20 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:47:21 PM	Tube furnace set to 150
1/8/2013	4:47:22 PM	Run finished at 4:47 PM
1/8/2013	4:54:20 PM	Main Vac valve closed
1/8/2013	4:54:33 PM	Main Vac valve opened
1/8/2013	4:55:51 PM	Main Vac valve closed
1/8/2013	4:56:03 PM	Main Vac valve opened
1/8/2013	4:56:30 PM	Recipe started at 4:56 PM
1/8/2013	4:56:30 PM	Helium valve closed
1/8/2013	4:56:30 PM	H2 valve closed
1/8/2013	4:56:30 PM	BCl3 valve closed
1/8/2013	4:56:30 PM	PH3 valve closed
1/8/2013	4:56:30 PM	SiCl4 pre valve closed
1/8/2013	4:56:30 PM	SiCl4 post valve closed
1/8/2013	4:56:30 PM	Main Vac valve closed
1/8/2013	4:56:30 PM	Bypass valve closed
1/8/2013	4:56:30 PM	Bubbler valve closed
1/8/2013	4:56:30 PM	Helium MFC set to  0.000000
1/8/2013	4:56:30 PM	H2 MFC set to  0.000000
1/8/2013	4:56:30 PM	BCl3 MFC set to  0.000000
1/8/2013	4:56:30 PM	PH3 MFC set to  0.000000
1/8/2013	4:56:30 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:56:30 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:56:30 PM	Tube furnace set to 0
1/8/2013	4:56:33 PM	Helium valve closed
1/8/2013	4:56:33 PM	BCl3 valve closed
1/8/2013	4:56:33 PM	PH3 valve closed
1/8/2013	4:56:33 PM	SiCl4 pre valve closed
1/8/2013	4:56:33 PM	SiCl4 post valve closed
1/8/2013	4:56:33 PM	Main Vac valve closed
1/8/2013	4:56:33 PM	Bypass valve closed
1/8/2013	4:56:33 PM	Bubbler valve closed
1/8/2013	4:56:33 PM	H2 valve opened
1/8/2013	4:56:33 PM	Helium MFC set to  0.000000
1/8/2013	4:56:33 PM	H2 MFC set to  500.000000
1/8/2013	4:56:33 PM	BCl3 MFC set to  0.000000
1/8/2013	4:56:33 PM	PH3 MFC set to  0.000000
1/8/2013	4:56:33 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:56:33 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:56:33 PM	Tube furnace set to 0
1/8/2013	4:57:45 PM	Helium valve closed
1/8/2013	4:57:45 PM	BCl3 valve closed
1/8/2013	4:57:45 PM	PH3 valve closed
1/8/2013	4:57:45 PM	SiCl4 pre valve closed
1/8/2013	4:57:45 PM	SiCl4 post valve closed
1/8/2013	4:57:45 PM	Main Vac valve closed
1/8/2013	4:57:45 PM	Bypass valve closed
1/8/2013	4:57:45 PM	H2 valve opened
1/8/2013	4:57:45 PM	Bubbler valve opened
1/8/2013	4:57:45 PM	Helium MFC set to  0.000000
1/8/2013	4:57:45 PM	H2 MFC set to  500.000000
1/8/2013	4:57:45 PM	BCl3 MFC set to  0.000000
1/8/2013	4:57:45 PM	PH3 MFC set to  0.000000
1/8/2013	4:57:45 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:57:45 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:57:46 PM	Tube furnace set to 0
1/8/2013	4:57:47 PM	Helium valve closed
1/8/2013	4:57:47 PM	BCl3 valve closed
1/8/2013	4:57:47 PM	PH3 valve closed
1/8/2013	4:57:47 PM	SiCl4 pre valve closed
1/8/2013	4:57:47 PM	SiCl4 post valve closed
1/8/2013	4:57:47 PM	Main Vac valve closed
1/8/2013	4:57:47 PM	Bypass valve closed
1/8/2013	4:57:47 PM	H2 valve opened
1/8/2013	4:57:47 PM	Bubbler valve opened
1/8/2013	4:57:47 PM	Helium MFC set to  0.000000
1/8/2013	4:57:47 PM	H2 MFC set to  500.000000
1/8/2013	4:57:47 PM	BCl3 MFC set to  0.000000
1/8/2013	4:57:47 PM	PH3 MFC set to  0.000000
1/8/2013	4:57:47 PM	SiCl4 MFC set to  0.000000
1/8/2013	4:57:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	4:57:47 PM	Tube furnace set to 1000
1/8/2013	5:17:47 PM	Helium valve closed
1/8/2013	5:17:47 PM	BCl3 valve closed
1/8/2013	5:17:47 PM	Main Vac valve closed
1/8/2013	5:17:47 PM	Bypass valve closed
1/8/2013	5:17:47 PM	H2 valve opened
1/8/2013	5:17:47 PM	PH3 valve opened
1/8/2013	5:17:47 PM	SiCl4 pre valve opened
1/8/2013	5:17:47 PM	SiCl4 post valve opened
1/8/2013	5:17:47 PM	Bubbler valve opened
1/8/2013	5:17:47 PM	Helium MFC set to  0.000000
1/8/2013	5:17:47 PM	H2 MFC set to  500.000000
1/8/2013	5:17:47 PM	BCl3 MFC set to  0.000000
1/8/2013	5:17:47 PM	PH3 MFC set to  0.300000
1/8/2013	5:17:47 PM	SiCl4 MFC set to  50.000000
1/8/2013	5:17:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	5:17:47 PM	Tube furnace set to 1000
1/8/2013	5:37:47 PM	Helium valve closed
1/8/2013	5:37:47 PM	BCl3 valve closed
1/8/2013	5:37:47 PM	PH3 valve closed
1/8/2013	5:37:47 PM	SiCl4 pre valve closed
1/8/2013	5:37:47 PM	SiCl4 post valve closed
1/8/2013	5:37:47 PM	Main Vac valve closed
1/8/2013	5:37:47 PM	Bypass valve closed
1/8/2013	5:37:47 PM	H2 valve opened
1/8/2013	5:37:47 PM	Bubbler valve opened
1/8/2013	5:37:47 PM	Helium MFC set to  0.000000
1/8/2013	5:37:47 PM	H2 MFC set to  500.000000
1/8/2013	5:37:47 PM	BCl3 MFC set to  0.000000
1/8/2013	5:37:47 PM	PH3 MFC set to  0.000000
1/8/2013	5:37:47 PM	SiCl4 MFC set to  0.000000
1/8/2013	5:37:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	5:37:47 PM	Tube furnace set to 950
1/8/2013	5:40:47 PM	H2 valve closed
1/8/2013	5:40:47 PM	BCl3 valve closed
1/8/2013	5:40:47 PM	PH3 valve closed
1/8/2013	5:40:47 PM	SiCl4 pre valve closed
1/8/2013	5:40:47 PM	SiCl4 post valve closed
1/8/2013	5:40:47 PM	Main Vac valve closed
1/8/2013	5:40:47 PM	Bypass valve closed
1/8/2013	5:40:47 PM	Helium valve opened
1/8/2013	5:40:47 PM	Bubbler valve opened
1/8/2013	5:40:47 PM	Helium MFC set to  500.000000
1/8/2013	5:40:47 PM	H2 MFC set to  0.000000
1/8/2013	5:40:47 PM	BCl3 MFC set to  0.000000
1/8/2013	5:40:47 PM	PH3 MFC set to  0.000000
1/8/2013	5:40:47 PM	SiCl4 MFC set to  0.000000
1/8/2013	5:40:47 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	5:40:48 PM	Tube furnace set to 900
1/8/2013	5:43:48 PM	H2 valve closed
1/8/2013	5:43:48 PM	BCl3 valve closed
1/8/2013	5:43:48 PM	PH3 valve closed
1/8/2013	5:43:48 PM	SiCl4 pre valve closed
1/8/2013	5:43:48 PM	SiCl4 post valve closed
1/8/2013	5:43:48 PM	Main Vac valve closed
1/8/2013	5:43:48 PM	Bypass valve closed
1/8/2013	5:43:48 PM	Helium valve opened
1/8/2013	5:43:48 PM	Bubbler valve opened
1/8/2013	5:43:48 PM	Helium MFC set to  500.000000
1/8/2013	5:43:48 PM	H2 MFC set to  0.000000
1/8/2013	5:43:48 PM	BCl3 MFC set to  0.000000
1/8/2013	5:43:48 PM	PH3 MFC set to  0.000000
1/8/2013	5:43:48 PM	SiCl4 MFC set to  0.000000
1/8/2013	5:43:48 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	5:43:48 PM	Tube furnace set to 850
1/8/2013	5:46:48 PM	H2 valve closed
1/8/2013	5:46:48 PM	BCl3 valve closed
1/8/2013	5:46:48 PM	PH3 valve closed
1/8/2013	5:46:48 PM	SiCl4 pre valve closed
1/8/2013	5:46:48 PM	SiCl4 post valve closed
1/8/2013	5:46:48 PM	Main Vac valve closed
1/8/2013	5:46:48 PM	Bypass valve closed
1/8/2013	5:46:48 PM	Helium valve opened
1/8/2013	5:46:48 PM	Bubbler valve opened
1/8/2013	5:46:48 PM	Helium MFC set to  500.000000
1/8/2013	5:46:48 PM	H2 MFC set to  0.000000
1/8/2013	5:46:48 PM	BCl3 MFC set to  0.000000
1/8/2013	5:46:48 PM	PH3 MFC set to  0.000000
1/8/2013	5:46:48 PM	SiCl4 MFC set to  0.000000
1/8/2013	5:46:48 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	5:46:48 PM	Tube furnace set to 800
1/8/2013	5:49:48 PM	H2 valve closed
1/8/2013	5:49:48 PM	BCl3 valve closed
1/8/2013	5:49:48 PM	PH3 valve closed
1/8/2013	5:49:48 PM	SiCl4 pre valve closed
1/8/2013	5:49:48 PM	SiCl4 post valve closed
1/8/2013	5:49:48 PM	Main Vac valve closed
1/8/2013	5:49:48 PM	Bypass valve closed
1/8/2013	5:49:48 PM	Helium valve opened
1/8/2013	5:49:48 PM	Bubbler valve opened
1/8/2013	5:49:48 PM	Helium MFC set to  500.000000
1/8/2013	5:49:48 PM	H2 MFC set to  0.000000
1/8/2013	5:49:48 PM	BCl3 MFC set to  0.000000
1/8/2013	5:49:48 PM	PH3 MFC set to  0.000000
1/8/2013	5:49:48 PM	SiCl4 MFC set to  0.000000
1/8/2013	5:49:48 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	5:49:48 PM	Tube furnace set to 750
1/8/2013	5:52:48 PM	H2 valve closed
1/8/2013	5:52:48 PM	BCl3 valve closed
1/8/2013	5:52:48 PM	PH3 valve closed
1/8/2013	5:52:48 PM	SiCl4 pre valve closed
1/8/2013	5:52:48 PM	SiCl4 post valve closed
1/8/2013	5:52:48 PM	Main Vac valve closed
1/8/2013	5:52:48 PM	Bypass valve closed
1/8/2013	5:52:48 PM	Helium valve opened
1/8/2013	5:52:48 PM	Bubbler valve opened
1/8/2013	5:52:48 PM	Helium MFC set to  500.000000
1/8/2013	5:52:48 PM	H2 MFC set to  0.000000
1/8/2013	5:52:48 PM	BCl3 MFC set to  0.000000
1/8/2013	5:52:48 PM	PH3 MFC set to  0.000000
1/8/2013	5:52:48 PM	SiCl4 MFC set to  0.000000
1/8/2013	5:52:48 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	5:52:49 PM	Tube furnace set to 0
1/8/2013	6:12:48 PM	Helium valve closed
1/8/2013	6:12:49 PM	H2 valve closed
1/8/2013	6:12:49 PM	BCl3 valve closed
1/8/2013	6:12:49 PM	PH3 valve closed
1/8/2013	6:12:49 PM	SiCl4 pre valve closed
1/8/2013	6:12:49 PM	SiCl4 post valve closed
1/8/2013	6:12:49 PM	Main Vac valve closed
1/8/2013	6:12:49 PM	Bypass valve closed
1/8/2013	6:12:49 PM	Bubbler valve closed
1/8/2013	6:12:49 PM	Helium MFC set to  0.000000
1/8/2013	6:12:49 PM	H2 MFC set to  0.000000
1/8/2013	6:12:49 PM	BCl3 MFC set to  0.000000
1/8/2013	6:12:49 PM	PH3 MFC set to  0.000000
1/8/2013	6:12:49 PM	SiCl4 MFC set to  0.000000
1/8/2013	6:12:49 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	6:12:49 PM	Tube furnace set to 0
1/8/2013	6:12:50 PM	Run finished at 6:12 PM
1/8/2013	6:57:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	6:57:26 PM	Recipe started at 6:57 PM
1/8/2013	6:57:26 PM	Helium valve closed
1/8/2013	6:57:26 PM	H2 valve closed
1/8/2013	6:57:26 PM	BCl3 valve closed
1/8/2013	6:57:26 PM	PH3 valve closed
1/8/2013	6:57:26 PM	SiCl4 pre valve closed
1/8/2013	6:57:26 PM	SiCl4 post valve closed
1/8/2013	6:57:26 PM	Main Vac valve closed
1/8/2013	6:57:26 PM	Bypass valve closed
1/8/2013	6:57:26 PM	Bubbler valve closed
1/8/2013	6:57:26 PM	Helium MFC set to  0.000000
1/8/2013	6:57:26 PM	H2 MFC set to  0.000000
1/8/2013	6:57:26 PM	BCl3 MFC set to  0.000000
1/8/2013	6:57:26 PM	PH3 MFC set to  0.000000
1/8/2013	6:57:26 PM	SiCl4 MFC set to  0.000000
1/8/2013	6:57:26 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	6:57:26 PM	Tube furnace set to 0
1/8/2013	6:57:29 PM	H2 valve closed
1/8/2013	6:57:29 PM	BCl3 valve closed
1/8/2013	6:57:29 PM	PH3 valve closed
1/8/2013	6:57:29 PM	SiCl4 pre valve closed
1/8/2013	6:57:29 PM	SiCl4 post valve closed
1/8/2013	6:57:29 PM	Main Vac valve closed
1/8/2013	6:57:29 PM	Bypass valve closed
1/8/2013	6:57:29 PM	Bubbler valve closed
1/8/2013	6:57:29 PM	Helium valve opened
1/8/2013	6:57:29 PM	Helium MFC set to  500.000000
1/8/2013	6:57:29 PM	H2 MFC set to  0.000000
1/8/2013	6:57:29 PM	BCl3 MFC set to  0.000000
1/8/2013	6:57:29 PM	PH3 MFC set to  0.000000
1/8/2013	6:57:29 PM	SiCl4 MFC set to  0.000000
1/8/2013	6:57:29 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	6:57:29 PM	Tube furnace set to 0
1/8/2013	6:57:31 PM	Helium valve closed
1/8/2013	6:57:31 PM	H2 valve closed
1/8/2013	6:57:31 PM	BCl3 valve closed
1/8/2013	6:57:31 PM	PH3 valve closed
1/8/2013	6:57:31 PM	SiCl4 pre valve closed
1/8/2013	6:57:31 PM	SiCl4 post valve closed
1/8/2013	6:57:31 PM	Main Vac valve closed
1/8/2013	6:57:31 PM	Bypass valve closed
1/8/2013	6:57:31 PM	Bubbler valve closed
1/8/2013	6:57:31 PM	Helium MFC set to  0.000000
1/8/2013	6:57:31 PM	H2 MFC set to  0.000000
1/8/2013	6:57:31 PM	BCl3 MFC set to  0.000000
1/8/2013	6:57:31 PM	PH3 MFC set to  0.000000
1/8/2013	6:57:31 PM	SiCl4 MFC set to  0.000000
1/8/2013	6:57:31 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	6:57:31 PM	Tube furnace set to 0
1/8/2013	6:57:32 PM	Run finished at 6:57 PM
1/8/2013	6:57:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/8/2013	7:13:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/8/2013	7:13:48 PM	Recipe started at 7:13 PM
1/8/2013	7:13:48 PM	Helium valve closed
1/8/2013	7:13:48 PM	H2 valve closed
1/8/2013	7:13:48 PM	BCl3 valve closed
1/8/2013	7:13:48 PM	PH3 valve closed
1/8/2013	7:13:48 PM	SiCl4 pre valve closed
1/8/2013	7:13:48 PM	SiCl4 post valve closed
1/8/2013	7:13:48 PM	Main Vac valve closed
1/8/2013	7:13:48 PM	Bubbler valve closed
1/8/2013	7:13:48 PM	Bypass valve opened
1/8/2013	7:13:48 PM	Helium MFC set to  0.000000
1/8/2013	7:13:48 PM	H2 MFC set to  0.000000
1/8/2013	7:13:48 PM	BCl3 MFC set to  0.000000
1/8/2013	7:13:48 PM	PH3 MFC set to  0.000000
1/8/2013	7:13:48 PM	SiCl4 MFC set to  0.000000
1/8/2013	7:13:48 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	7:13:48 PM	Tube furnace set to 0
1/8/2013	7:15:21 PM	Helium valve closed
1/8/2013	7:15:21 PM	H2 valve closed
1/8/2013	7:15:21 PM	BCl3 valve closed
1/8/2013	7:15:21 PM	PH3 valve closed
1/8/2013	7:15:21 PM	SiCl4 pre valve closed
1/8/2013	7:15:21 PM	SiCl4 post valve closed
1/8/2013	7:15:21 PM	Main Vac valve closed
1/8/2013	7:15:21 PM	Bubbler valve closed
1/8/2013	7:15:21 PM	Bypass valve opened
1/8/2013	7:15:21 PM	Helium MFC set to  0.000000
1/8/2013	7:15:21 PM	H2 MFC set to  0.000000
1/8/2013	7:15:21 PM	BCl3 MFC set to  0.000000
1/8/2013	7:15:21 PM	PH3 MFC set to  0.000000
1/8/2013	7:15:21 PM	SiCl4 MFC set to  0.000000
1/8/2013	7:15:21 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	7:15:21 PM	Tube furnace set to 0
1/8/2013	7:16:21 PM	Helium valve closed
1/8/2013	7:16:21 PM	H2 valve closed
1/8/2013	7:16:21 PM	BCl3 valve closed
1/8/2013	7:16:21 PM	PH3 valve closed
1/8/2013	7:16:21 PM	SiCl4 pre valve closed
1/8/2013	7:16:21 PM	SiCl4 post valve closed
1/8/2013	7:16:21 PM	Bypass valve closed
1/8/2013	7:16:21 PM	Bubbler valve closed
1/8/2013	7:16:21 PM	Main Vac valve opened
1/8/2013	7:16:21 PM	Helium MFC set to  0.000000
1/8/2013	7:16:21 PM	H2 MFC set to  0.000000
1/8/2013	7:16:21 PM	BCl3 MFC set to  0.000000
1/8/2013	7:16:21 PM	PH3 MFC set to  0.000000
1/8/2013	7:16:21 PM	SiCl4 MFC set to  0.000000
1/8/2013	7:16:21 PM	Bypass solenoid MFC set to  0.000000
1/8/2013	7:16:21 PM	Tube furnace set to 0
1/8/2013	7:16:22 PM	Run finished at 7:16 PM
1/8/2013	7:16:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
